Preparation of A-axis Oriented YBa 2 Cu 3 O 7-y Films by Metalorganic Chemical Vapor Deposition Using Liquid Sources

Superconducting YBa 2 Cu 3 O 7- y (YBCO) thin films were prepared on SrTiO 3 (100), NdGaO 3 (110) and LaAlO 3 (100) single crystalline substrates by metalorganic chemical vapor deposition (MOCVD) using various kinds of liquid sources. Films deposited using Ba(DPM) 2 ·tetraen on SrTiO 3 (100) at temp...

Full description

Saved in:
Bibliographic Details
Published inJapanese Journal of Applied Physics Vol. 36; no. 7A; p. L852
Main Authors Yoshida, Yutaka, Ito, Yoshiaki, Nagai, Hisashi, Takai, Yoshiaki, Izumi Hirabayashi, Izumi Hirabayashi
Format Journal Article
LanguageEnglish
Published 01.07.1997
Online AccessGet full text

Cover

More Information
Summary:Superconducting YBa 2 Cu 3 O 7- y (YBCO) thin films were prepared on SrTiO 3 (100), NdGaO 3 (110) and LaAlO 3 (100) single crystalline substrates by metalorganic chemical vapor deposition (MOCVD) using various kinds of liquid sources. Films deposited using Ba(DPM) 2 ·tetraen on SrTiO 3 (100) at temperatures between 650° C and 700° C were strongly a -axis oriented. Furthermore, films deposited in the same temperature range, but grown on NdGaO 3 (110) and LaAlO 3 (100), showed a-/b -axis mixed orientation and b -axis orientation, respectively. Thus, deposition using liquid sources enables us to control the orientation in MOCVD, which has never been attained.
ISSN:0021-4922
1347-4065
DOI:10.1143/JJAP.36.L852