Fabrication of Si 3 N 4 /SiO 2 tiered resonant nanopillars with nickel caps arrays: application for optochemical sensing

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Published inOptical materials express Vol. 8; no. 4; p. 1082
Main Authors Canalejas-Tejero, V., Hernández, A. L., Casquel, R., Quintero, S. A., Laguna, M. F., Holgado, M.
Format Journal Article
LanguageEnglish
Published 01.04.2018
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Author Canalejas-Tejero, V.
Quintero, S. A.
Casquel, R.
Hernández, A. L.
Holgado, M.
Laguna, M. F.
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Title Fabrication of Si 3 N 4 /SiO 2 tiered resonant nanopillars with nickel caps arrays: application for optochemical sensing
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