Fabrication of Si 3 N 4 /SiO 2 tiered resonant nanopillars with nickel caps arrays: application for optochemical sensing

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Bibliographic Details
Published inOptical materials express Vol. 8; no. 4; p. 1082
Main Authors Canalejas-Tejero, V., Hernández, A. L., Casquel, R., Quintero, S. A., Laguna, M. F., Holgado, M.
Format Journal Article
LanguageEnglish
Published 01.04.2018
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ISSN:2159-3930
2159-3930
DOI:10.1364/OME.8.001082