Voltage Contrast within Electron Microscopy: From a Curious Effect to Debugging Modern ICs

Abstract A scanning electron microscope system measures voltage contrast on device-under-test surfaces. This article addresses a limited set of applications that rely on voltage contrast (VC) measurements in SEM systems, showing how VC measurements can probe electrical activity running at speeds as...

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Bibliographic Details
Published inElectronic device failure analysis Vol. 25; no. 4; pp. 28 - 34
Main Authors Vickers, James, Freeman, Blake, Leslie, Neel
Format Magazine Article
LanguageEnglish
Published Materials Park Electronic Device Failure Analysis Society 01.11.2023
Subjects
Charged particles
Debugging
Electric potential
Electron microscopes
Electron microscopy
Image resolution
Integrated circuits
Ion beams
Optics
Substrates
Voltage
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Summary:Abstract A scanning electron microscope system measures voltage contrast on device-under-test surfaces. This article addresses a limited set of applications that rely on voltage contrast (VC) measurements in SEM systems, showing how VC measurements can probe electrical activity running at speeds as high as 2 GHz on modern active integrated circuits.
Bibliography:content type line 24
ObjectType-Feature-1
SourceType-Magazines-1
ISSN:1537-0755
2304-8115
DOI:10.31399/asm.edfa.2023-4.p028