Advanced Characterization of Materials Using Atom Probe Tomography

Abstract New materials integration and improved design can be promoted by using atom probe tomography (APT) as an analysis technique. This article provides an overview of APT principles and setups and provides diverse examples that focus on its use to characterize electronic devices.

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Bibliographic Details
Published inElectronic device failure analysis Vol. 26; no. 1; pp. 14 - 21
Main Authors Garcia, Jacob M., Chiaramonti, Ann N.
Format Magazine Article
LanguageEnglish
Published Materials Park Electronic Device Failure Analysis Society 01.02.2024
Subjects
Electric fields
Failure modes
Mathematical analysis
Periodic table
Secondary ion mass spectrometry
Spatial resolution
Thermal stress
Tomography
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Summary:Abstract New materials integration and improved design can be promoted by using atom probe tomography (APT) as an analysis technique. This article provides an overview of APT principles and setups and provides diverse examples that focus on its use to characterize electronic devices.
Bibliography:content type line 24
ObjectType-Feature-1
SourceType-Magazines-1
ISSN:1537-0755
2304-8115
DOI:10.31399/asm.edfa.2024-1.p014