Atmospheric Pressure Atomic Layer Deposition of Al 2 O 3 Using Trimethyl Aluminum and Ozone

Saved in:
Bibliographic Details
Published inLangmuir Vol. 30; no. 13; pp. 3741 - 3748
Main Authors Mousa, Moataz Bellah M., Oldham, Christopher J., Parsons, Gregory N.
Format Journal Article
LanguageEnglish
Published 08.04.2014
Online AccessGet full text

Cover

More Information
ISSN:0743-7463
1520-5827
DOI:10.1021/la500796r