Determination of the Absolute Thickness of Ultrathin Al 2 O 3 Overlayers on Si (100) Substrate
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Published in | Analytical chemistry (Washington) Vol. 81; no. 20; pp. 8519 - 8522 |
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Main Authors | , , , , |
Format | Journal Article |
Language | English |
Published |
15.10.2009
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Online Access | Get full text |
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ISSN: | 0003-2700 1520-6882 |
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DOI: | 10.1021/ac901463m |