Growth of Conductive SrRuO 3 Films by Combining Atomic Layer Deposited SrO and Chemical Vapor Deposited RuO 2 Layers

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Bibliographic Details
Published inChemistry of materials Vol. 24; no. 24; pp. 4686 - 4692
Main Authors Han, Jeong Hwan, Lee, Woongkyu, Jeon, Woojin, Lee, Sang Woon, Hwang, Cheol Seong, Ko, Changhee, Gatineau, Julien
Format Journal Article
LanguageEnglish
Published 21.12.2012
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ISSN:0897-4756
1520-5002
DOI:10.1021/cm302470k