Tailoring Silica Nanotribology for CMP Slurry Optimization: Ca 2+ Cation Competition in C 12 TAB Mediated Lubrication

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Bibliographic Details
Published inACS applied materials & interfaces Vol. 2; no. 4; pp. 1228 - 1235
Main Authors Vakarelski, Ivan U., Brown, Scott C., Basim, G. Bahar, Rabinovich, Yakov I., Moudgil, Brij M.
Format Journal Article
LanguageEnglish
Published 28.04.2010
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ISSN:1944-8244
1944-8252
DOI:10.1021/am100070e