Development of Barrier Anodic Oxide Al[sub 2]O[sub 3] Passivations of Aluminum Alloy Surface for LSI/FPD Plasma Process Equipment

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Bibliographic Details
Published inJournal of the Electrochemical Society Vol. 154; no. 9; p. C530
Main Authors Kawase, Yasuhiro, Kitano, Masafumi, Mizutani, Fumikazu, Saeki, Masayuki, Shirai, Yasuyuki, Ohmi, Tadahiro
Format Journal Article
LanguageEnglish
Published 2007
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ISSN:0013-4651
DOI:10.1149/1.2755877