Growth of (Ti,Zr)N Films on Si by DC Reactive Sputtering of TiZr in N[sub 2]/Ar Gas Mixtures
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Published in | Journal of the Electrochemical Society Vol. 151; no. 3; p. C176 |
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Main Authors | , , , , , , , , , , |
Format | Journal Article |
Language | English |
Published |
2004
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Online Access | Get full text |
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ISSN: | 0013-4651 |
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DOI: | 10.1149/1.1644603 |