c -Axis Aligned 3 nm Thick In 2 O 3 Crystal Using New Liquid DBADMIn Precursor for Highly Scaled FET Beyond the Mobility-Stability Trade-off
Oxide semiconductors (OS) are attractive materials for memory and logic device applications owing to their low off-current, high field effect mobility, and superior large-area uniformity. Recently, successful research has reported the high field-effect mobility (μ ) of crystalline OS channel transis...
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Published in | Nano letters Vol. 24; no. 4; pp. 1324 - 1331 |
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Main Authors | , , , , , , , |
Format | Journal Article |
Language | English |
Published |
United States
31.01.2024
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Subjects | |
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Abstract | Oxide semiconductors (OS) are attractive materials for memory and logic device applications owing to their low off-current, high field effect mobility, and superior large-area uniformity. Recently, successful research has reported the high field-effect mobility (μ
) of crystalline OS channel transistors (above 50 cm
V
s
). However, the memory and logic device application presents challenges in mobility and stability trade-offs. Here, we propose a method for achieving high-mobility and high-stability by lowering the grain boundary effect. A DBADMIn precursor was synthesized to deposit highly
-axis-aligned C(222) crystalline 3 nm thick In
O
films. In this study, the 250 °C deposited 3 nm thick In
O
channel transistor exhibited high μ
of 41.12 cm
V
s
,
of -0.50 V, and SS of 150 mV decade
with superior stability of 0.16 V positive shift during PBTS at 100 °C, 3 MV cm
stress conditions for 3 h. |
---|---|
AbstractList | Oxide semiconductors (OS) are attractive materials for memory and logic device applications owing to their low off-current, high field effect mobility, and superior large-area uniformity. Recently, successful research has reported the high field-effect mobility (μ
) of crystalline OS channel transistors (above 50 cm
V
s
). However, the memory and logic device application presents challenges in mobility and stability trade-offs. Here, we propose a method for achieving high-mobility and high-stability by lowering the grain boundary effect. A DBADMIn precursor was synthesized to deposit highly
-axis-aligned C(222) crystalline 3 nm thick In
O
films. In this study, the 250 °C deposited 3 nm thick In
O
channel transistor exhibited high μ
of 41.12 cm
V
s
,
of -0.50 V, and SS of 150 mV decade
with superior stability of 0.16 V positive shift during PBTS at 100 °C, 3 MV cm
stress conditions for 3 h. |
Author | Choi, Su-Hwan Yeon, Changbong Park, Jin-Seong Ryu, Seong-Hwan Jung, Jaesun Kim, Dong-Gyu Park, Young-Soo Kwag, Jae-Hyeok |
Author_xml | – sequence: 1 givenname: Su-Hwan orcidid: 0000-0001-8917-1276 surname: Choi fullname: Choi, Su-Hwan organization: Division of Nanoscale Semiconductor Engineering, Hanyang University, 222 Wangsimni-ro, Seongdong-gu, Seoul, 04763, Republic of Korea – sequence: 2 givenname: Seong-Hwan surname: Ryu fullname: Ryu, Seong-Hwan organization: Division of Materials Science and Engineering, Hanyang University, 222, Wangsimni-ro, Seongdong-gu, Seoul, 04763, Republic of Korea – sequence: 3 givenname: Dong-Gyu surname: Kim fullname: Kim, Dong-Gyu organization: Division of Materials Science and Engineering, Hanyang University, 222, Wangsimni-ro, Seongdong-gu, Seoul, 04763, Republic of Korea – sequence: 4 givenname: Jae-Hyeok surname: Kwag fullname: Kwag, Jae-Hyeok organization: Division of Nanoscale Semiconductor Engineering, Hanyang University, 222 Wangsimni-ro, Seongdong-gu, Seoul, 04763, Republic of Korea – sequence: 5 givenname: Changbong surname: Yeon fullname: Yeon, Changbong organization: Thin Film Materials Development Team, Soulbrain, 14-102 Gongdan-Gil, Gongju Republic of Korea – sequence: 6 givenname: Jaesun surname: Jung fullname: Jung, Jaesun organization: Thin Film Materials Development Team, Soulbrain, 14-102 Gongdan-Gil, Gongju Republic of Korea – sequence: 7 givenname: Young-Soo surname: Park fullname: Park, Young-Soo organization: Thin Film Materials Development Team, Soulbrain, 14-102 Gongdan-Gil, Gongju Republic of Korea – sequence: 8 givenname: Jin-Seong orcidid: 0000-0002-9070-5666 surname: Park fullname: Park, Jin-Seong organization: Division of Materials Science and Engineering, Hanyang University, 222, Wangsimni-ro, Seongdong-gu, Seoul, 04763, Republic of Korea |
BackLink | https://www.ncbi.nlm.nih.gov/pubmed/38230977$$D View this record in MEDLINE/PubMed |
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Keywords | Atomic Layer Deposition (ALD) Oxide Semiconductor Crystallinity New Indium Precursor Field-Effect Transistor (FET) |
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Title | c -Axis Aligned 3 nm Thick In 2 O 3 Crystal Using New Liquid DBADMIn Precursor for Highly Scaled FET Beyond the Mobility-Stability Trade-off |
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