基于双频激光干涉仪的精密定位系统设计
为实现某些光学部件或高精度测量仪器快速驱动与定位,设计并实现了一套快速精密定位系统。该精密定位系统采用双闭式气浮导轨支撑工作台,直流力矩电机通过谐波减速器减速,以摩擦驱动的方式实现快速定位。以双频激光干涉仪作为最终位置反馈,有效地在定位过程中消除了系统在运动过程中形变和应力释放带来的不确定干扰。采用带有前馈算法的PID控制技术,通过调节各参数,使系统具有快速平滑的响应特性。相对于传统设计方式,在保证精度的同时,降低了系统的复杂程度,也降低了对加工工艺的要求。经过实验测试,定位精度可达176nm,单步稳定所需时间在2 s以内,满足精密定位需求。...
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| Published in | 实验室研究与探索 Vol. 35; no. 11; pp. 72 - 75 |
|---|---|
| Main Author | |
| Format | Journal Article |
| Language | Chinese |
| Published |
中国科学院长春光学精密机械与物理研究所,吉林长春,130033%解放军93313部队,吉林长春,130111
2016
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| Subjects | |
| Online Access | Get full text |
| ISSN | 1006-7167 |
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| Abstract | 为实现某些光学部件或高精度测量仪器快速驱动与定位,设计并实现了一套快速精密定位系统。该精密定位系统采用双闭式气浮导轨支撑工作台,直流力矩电机通过谐波减速器减速,以摩擦驱动的方式实现快速定位。以双频激光干涉仪作为最终位置反馈,有效地在定位过程中消除了系统在运动过程中形变和应力释放带来的不确定干扰。采用带有前馈算法的PID控制技术,通过调节各参数,使系统具有快速平滑的响应特性。相对于传统设计方式,在保证精度的同时,降低了系统的复杂程度,也降低了对加工工艺的要求。经过实验测试,定位精度可达176nm,单步稳定所需时间在2 s以内,满足精密定位需求。 |
|---|---|
| AbstractList | 为实现某些光学部件或高精度测量仪器快速驱动与定位,设计并实现了一套快速精密定位系统。该精密定位系统采用双闭式气浮导轨支撑工作台,直流力矩电机通过谐波减速器减速,以摩擦驱动的方式实现快速定位。以双频激光干涉仪作为最终位置反馈,有效地在定位过程中消除了系统在运动过程中形变和应力释放带来的不确定干扰。采用带有前馈算法的PID控制技术,通过调节各参数,使系统具有快速平滑的响应特性。相对于传统设计方式,在保证精度的同时,降低了系统的复杂程度,也降低了对加工工艺的要求。经过实验测试,定位精度可达176nm,单步稳定所需时间在2 s以内,满足精密定位需求。 TP273+.5; 为实现某些光学部件或高精度测量仪器快速驱动与定位,设计并实现了一套快速精密定位系统.该精密定位系统采用双闭式气浮导轨支撑工作台,直流力矩电机通过谐波减速器减速,以摩擦驱动的方式实现快速定位.以双频激光干涉仪作为最终位置反馈,有效地在定位过程中消除了系统在运动过程中形变和应力释放带来的不确定干扰.采用带有前馈算法的PID控制技术,通过调节各参数,使系统具有快速平滑的响应特性.相对于传统设计方式,在保证精度的同时,降低了系统的复杂程度,也降低了对加工工艺的要求.经过实验测试,定位精度可达176nm,单步稳定所需时间在2 s以内,满足精密定位需求. |
| Author | 陈昊 陈琦 蒋贵德 |
| AuthorAffiliation | 中国科学院长春光学精密机械与物理研究所,吉林长春130033 解放军93313部队,吉林长春130111 |
| AuthorAffiliation_xml | – name: 中国科学院长春光学精密机械与物理研究所,吉林长春,130033%解放军93313部队,吉林长春,130111 |
| Author_FL | CHEN Qi CHEN Hao JIANG Gui-de |
| Author_FL_xml | – sequence: 1 fullname: CHEN Hao – sequence: 2 fullname: CHEN Qi – sequence: 3 fullname: JIANG Gui-de |
| Author_xml | – sequence: 1 fullname: 陈昊 陈琦 蒋贵德 |
| BookMark | eNotzT9Lw0AYBvAbKlhrv4SbQ-DeXHLvZZTiPyi4dA-XeKkpmmiiSDYHFQpqce1SdHSIUEGwwfplck39Fgbq8jzLj-fZII0ojlSDNIFSbiBwXCftNA09SqnDHUS7SbiezMrZkx49_L4-L35u9N1Qf00Xn8OyeKvGt9V0rt_vdT4uvx-rj6IqJst8vsxfNslaIE9T1f7vFunt7fY6B0b3aP-ws9M1fA7C8Dy0JDPlsXIEMksxmwswTWlJFIr5NAATORPgSKa4FSgEgYC2B5IF6EvOWmR7NXsto0BGfXcQXyVRfeimWZoNssvUpMABKIjabq2sfxJH_Yuw1udJeCaTzOVIBbOhjj_we2M0 |
| ClassificationCodes | TP273+.5 |
| ContentType | Journal Article |
| Copyright | Copyright © Wanfang Data Co. Ltd. All Rights Reserved. |
| Copyright_xml | – notice: Copyright © Wanfang Data Co. Ltd. All Rights Reserved. |
| DBID | 2RA 92L CQIGP ~WA 2B. 4A8 92I 93N PSX TCJ |
| DatabaseName | 维普期刊资源整合服务平台 中文科技期刊数据库-CALIS站点 维普中文期刊数据库 中文科技期刊数据库- 镜像站点 Wanfang Data Journals - Hong Kong WANFANG Data Centre Wanfang Data Journals 万方数据期刊 - 香港版 China Online Journals (COJ) China Online Journals (COJ) |
| DatabaseTitleList | |
| DeliveryMethod | fulltext_linktorsrc |
| DocumentTitleAlternate | Design and Implementation of Precision Positioning System Based on Dual Frequency Laser Interferometer |
| DocumentTitle_FL | Design and Implementation of Precision Positioning System Based on Dual Frequency Laser Interferometer |
| EndPage | 75 |
| ExternalDocumentID | sysyjyts201611018 670835108 |
| GroupedDBID | 2RA 92L ALMA_UNASSIGNED_HOLDINGS CDYEO CQIGP ~WA 2B. 4A8 92I 93N PSX TCJ |
| ID | FETCH-LOGICAL-c618-bb74a32ade98734e3568122a4a78e3c0f12763819a3e64fe7187175b1a3f7ca63 |
| ISSN | 1006-7167 |
| IngestDate | Thu May 29 04:11:36 EDT 2025 Wed Feb 14 10:06:54 EST 2024 |
| IsPeerReviewed | false |
| IsScholarly | true |
| Issue | 11 |
| Keywords | feed forward control 气浮导轨 精密定位 air-lubricated guide rail 双频激光干涉仪 前馈控制 dual frequency laser interferometer positioning accuracy |
| Language | Chinese |
| LinkModel | OpenURL |
| MergedId | FETCHMERGED-LOGICAL-c618-bb74a32ade98734e3568122a4a78e3c0f12763819a3e64fe7187175b1a3f7ca63 |
| Notes | CHEN Hao1, CHEN Qi1, JIANG Gui-de2（1. Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China; 2. PLANO. 93313 Anny, Changchun 130111, China） In the field of precision optical engineering, a fast and precise positioning system is designed and implemented to realize the fast driving and positioning of some optical components or high precision measuring instruments. The precision positioning system uses a double closed air bearing guide rail support platform,DC torque motor which is slowed down by the harmonic reducer to,in order to achieve rapid positioning friction drive. The dual frequency laser interferometer is used as the final position feedback,which effectively eliminates the uncertainty caused by the deformation and stress release during the moving process. The PID control technology with feed forward algorithm is adopted to adjust the parameters,so that the system has the characteristics of fast and smooth response. Compared with the traditional d |
| PageCount | 4 |
| ParticipantIDs | wanfang_journals_sysyjyts201611018 chongqing_primary_670835108 |
| PublicationCentury | 2000 |
| PublicationDate | 2016 |
| PublicationDateYYYYMMDD | 2016-01-01 |
| PublicationDate_xml | – year: 2016 text: 2016 |
| PublicationDecade | 2010 |
| PublicationTitle | 实验室研究与探索 |
| PublicationTitleAlternate | Laboratory Research and Exploration |
| PublicationTitle_FL | Research and Exploration in Laboratory |
| PublicationYear | 2016 |
| Publisher | 中国科学院长春光学精密机械与物理研究所,吉林长春,130033%解放军93313部队,吉林长春,130111 |
| Publisher_xml | – name: 中国科学院长春光学精密机械与物理研究所,吉林长春,130033%解放军93313部队,吉林长春,130111 |
| SSID | ssib000969775 ssib006568229 ssib025702337 ssib036434175 ssib000862244 ssib051371591 ssib002264093 |
| Score | 2.0206006 |
| Snippet | ... TP273+.5;... |
| SourceID | wanfang chongqing |
| SourceType | Aggregation Database Publisher |
| StartPage | 72 |
| SubjectTerms | 前馈控制 双频激光干涉仪 气浮导轨 精密定位 |
| Title | 基于双频激光干涉仪的精密定位系统设计 |
| URI | http://lib.cqvip.com/qk/96941X/201611/670835108.html https://d.wanfangdata.com.cn/periodical/sysyjyts201611018 |
| Volume | 35 |
| hasFullText | 1 |
| inHoldings | 1 |
| isFullTextHit | |
| isPrint | |
| link | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwnV3Na9RAFA-1XryIomKtShHnGEky38eZ3SxF0FOF3pYkm7R42Kq7PWxPHlQo-IHXXooePVSoINhi_VO8dLv1v_C9SbZN7R5aYRleZt68eR9J5jezmRnPu5_hdIJMtA9vOu6zPAl9FbHC7-QZD4pCMFngQuFHj8X8E_ZwkS9OXfhd-2pptZ8-yNYmriv5n6hCHsQVV8meI7JHQiEDaIgvpBBhSM8UYxJzolvEGhIzTFWMOapFVIPEmpiI6JDEgtgWftCARfDTSFhNbOSKhMuB6pYYkCOJBjkMCWCwTqCB6sIRMZYic5OopuOhWBEJi5rECnmwliNMWMe-Ywmx0804JV2Occ2ZgOiS0KgVtqKcRQJTsAVbYUCM7xEUozVRClk08JoJJWBPQIw4LlFER0RZJECa5c4boLOsz3-UCzPdvVopYprO2RZNRx2lcy3HfCOq9lBHIDj6u1TJ8BNer5hPuxaYGy6MAoXYoGa9xLrgktISJSa5ysUQP-J0HkU27WSCs-UElaIG_ruIc-zcBQrkUFfKKq2gFW01pSHF2ooSo5wYhTE-TyPjLq7s9XBaCQbOst4tlrvIjB__sNbJlWctVXCpPPfmnz3Le4Pe4Omg38N4hbgnHGAkQMJq2rtobNO2Tgyo6wATBtQwIKkBeMDrQa0HgdEHnlAwvsYjGCN6DLAp4GtWA8Q8pBLwupt1GduIm6gsr3SXngM0dCv1ukXSXaqByoUr3uVqNDhnykf7qje1tnzNE8PNnf2d98MPb_98_njw6-Xw9frwx_bB9_X93S-jjVej7b3h1zfDrY39n-9G33ZHu5uHW3uHW5-uewuteKEx71fHm_iZCJWfppIlNEo6uVaSspy6rQCjhCVS5TQLijCCvh8Ae0JzwYocQKQE09IwoYXMEkFveNPdlW5-05uTnBcsTDXlacREVqQiyVgueYcnSadI6Yw3e2Ry-1m5i01bSBx9hYGa8e5VTmhX77Ze-1QAb52Fada7hHQ5Q3nbm-6_WM3vAGbvp3erwP8FRMKq8w |
| linkProvider | EBSCOhost |
| openUrl | ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&rft.genre=article&rft.atitle=%E5%9F%BA%E4%BA%8E%E5%8F%8C%E9%A2%91%E6%BF%80%E5%85%89%E5%B9%B2%E6%B6%89%E4%BB%AA%E7%9A%84%E7%B2%BE%E5%AF%86%E5%AE%9A%E4%BD%8D%E7%B3%BB%E7%BB%9F%E8%AE%BE%E8%AE%A1&rft.jtitle=%E5%AE%9E%E9%AA%8C%E5%AE%A4%E7%A0%94%E7%A9%B6%E4%B8%8E%E6%8E%A2%E7%B4%A2&rft.au=%E9%99%88%E6%98%8A&rft.au=%E9%99%88%E7%90%A6&rft.au=%E8%92%8B%E8%B4%B5%E5%BE%B7&rft.date=2016&rft.pub=%E4%B8%AD%E5%9B%BD%E7%A7%91%E5%AD%A6%E9%99%A2%E9%95%BF%E6%98%A5%E5%85%89%E5%AD%A6%E7%B2%BE%E5%AF%86%E6%9C%BA%E6%A2%B0%E4%B8%8E%E7%89%A9%E7%90%86%E7%A0%94%E7%A9%B6%E6%89%80%2C%E5%90%89%E6%9E%97%E9%95%BF%E6%98%A5%2C130033%25%E8%A7%A3%E6%94%BE%E5%86%9B93313%E9%83%A8%E9%98%9F%2C%E5%90%89%E6%9E%97%E9%95%BF%E6%98%A5%2C130111&rft.issn=1006-7167&rft.volume=35&rft.issue=11&rft.spage=72&rft.epage=75&rft.externalDocID=sysyjyts201611018 |
| thumbnail_s | http://utb.summon.serialssolutions.com/2.0.0/image/custom?url=http%3A%2F%2Fimage.cqvip.com%2Fvip1000%2Fqk%2F96941X%2F96941X.jpg http://utb.summon.serialssolutions.com/2.0.0/image/custom?url=http%3A%2F%2Fwww.wanfangdata.com.cn%2Fimages%2FPeriodicalImages%2Fsysyjyts%2Fsysyjyts.jpg |