基于双频激光干涉仪的精密定位系统设计
为实现某些光学部件或高精度测量仪器快速驱动与定位,设计并实现了一套快速精密定位系统。该精密定位系统采用双闭式气浮导轨支撑工作台,直流力矩电机通过谐波减速器减速,以摩擦驱动的方式实现快速定位。以双频激光干涉仪作为最终位置反馈,有效地在定位过程中消除了系统在运动过程中形变和应力释放带来的不确定干扰。采用带有前馈算法的PID控制技术,通过调节各参数,使系统具有快速平滑的响应特性。相对于传统设计方式,在保证精度的同时,降低了系统的复杂程度,也降低了对加工工艺的要求。经过实验测试,定位精度可达176nm,单步稳定所需时间在2 s以内,满足精密定位需求。...
Saved in:
| Published in | 实验室研究与探索 Vol. 35; no. 11; pp. 72 - 75 |
|---|---|
| Main Author | |
| Format | Journal Article |
| Language | Chinese |
| Published |
中国科学院长春光学精密机械与物理研究所,吉林长春,130033%解放军93313部队,吉林长春,130111
2016
|
| Subjects | |
| Online Access | Get full text |
| ISSN | 1006-7167 |
Cover
| Summary: | 为实现某些光学部件或高精度测量仪器快速驱动与定位,设计并实现了一套快速精密定位系统。该精密定位系统采用双闭式气浮导轨支撑工作台,直流力矩电机通过谐波减速器减速,以摩擦驱动的方式实现快速定位。以双频激光干涉仪作为最终位置反馈,有效地在定位过程中消除了系统在运动过程中形变和应力释放带来的不确定干扰。采用带有前馈算法的PID控制技术,通过调节各参数,使系统具有快速平滑的响应特性。相对于传统设计方式,在保证精度的同时,降低了系统的复杂程度,也降低了对加工工艺的要求。经过实验测试,定位精度可达176nm,单步稳定所需时间在2 s以内,满足精密定位需求。 |
|---|---|
| Bibliography: | CHEN Hao1, CHEN Qi1, JIANG Gui-de2（1. Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China; 2. PLANO. 93313 Anny, Changchun 130111, China） In the field of precision optical engineering, a fast and precise positioning system is designed and implemented to realize the fast driving and positioning of some optical components or high precision measuring instruments. The precision positioning system uses a double closed air bearing guide rail support platform,DC torque motor which is slowed down by the harmonic reducer to,in order to achieve rapid positioning friction drive. The dual frequency laser interferometer is used as the final position feedback,which effectively eliminates the uncertainty caused by the deformation and stress release during the moving process. The PID control technology with feed forward algorithm is adopted to adjust the parameters,so that the system has the characteristics of fast and smooth response. Compared with the traditional d |
| ISSN: | 1006-7167 |