MEMS Sensor for In Situ TEM Atomic Force Microscopy

• Published in: Journal of microelectromechanical systems Vol. 17; no. 2; pp. 328 - 333
• Main Authors: Nafari, A., Karlen, D., Rusu, C., Svensson, K., Olin, H., Enoksson, P.
• Format: Journal Article
• Language: English
• Published: New York, NY IEEE 2008; Institute of Electrical and Electronics Engineers; The Institute of Electrical and Electronics Engineers, Inc. (IEEE)
• Subjects: AFM; Applied sciences; Atomic force microscopy; Atomic force microscopy (AFM); Atomic measurements; Design engineering; Exact sciences and technology; Force measurement; force measurements; Force sensors; Fysik; high sensitivity; in situ transmission electron microscope (TEM); Instruments, apparatus, components and techniques common to several branches of physics and astronomy; Mechanical engineering. Machine design; Mechanical instruments, equipment and techniques; Mechanical sensors; MEMS; MEMS atomic force microscope sensor; MEMS sensor; Microelectromechanical systems; Micromechanical devices; Micromechanical devices and systems; nano wire characterization; Nanocomposites; Nanomaterials; nanoscale systems; nanosized structure mechanical characterization; Nanostructure; Nanostructures; nanotubpiezoresistive elements; nanowire characterization; NATURAL SCIENCES; NATURVETENSKAP; Physics; pole gap; Precision engineering, watch making; sensing device; sensor fabrication; Sensor phenomena and characterization; Sensor systems; Sensors; standard micromachining; TEM atomic force microscopy; TEM force measurements; TEM-SPM in-situ probing nanoteknik nanotechnology; transmission electron microscope; Transmission electron microscope (TEM); Transmission electron microscopy; Wheatstone bridge; Atomic force microscopy (AFM); MEMS; force measurements; in situ transmission electron microscope (TEM); nanowire characterization; Atomic force microscopy; Ion implantation; Force measurement; Piezoresistive devices; Measurement sensor; Micromachining; Nanotubes; Oxides; Nanostructures; Reactive ion etching; Transmission electron microscopy; High sensitivity; Embedded transducer; Nanowires; Microelectromechanical device; Nanotechnology; Wheatstone bridge
• ISSN: 1057-7157; 1941-0158; 1941-0158
• DOI: 10.1109/JMEMS.2007.912714

Here, we present a MEMS atomic force microscope sensor for use inside a transmission electron microscope (TEM). This enables direct in situ TEM force measurements in the nanonewton range and thus mechanical characterization of nanosized structures. The main design challenges of the system and sensor are to reach a high sensitivity and to make a compact design that allows the sensor to be fitted in the narrow dimensions of the pole gap inside the TEM. In order to miniaturize the sensing device, an integrated detection with piezoresistive elements arranged in a full Wheatstone bridge was used. Fabrication of the sensor was done using standard micromachining techniques, such as ion implantation, oxide growth and deep reactive ion etch. We also present in situ TEM force measurements on nanotubes, which demonstrate the ability to measure spring constants of nanoscale systems.