3D heterostructures and systems for novel MEMS/NEMS

• Published in: Science and technology of advanced materials Vol. 10; no. 3; p. 034502
• Main Authors: Yakovlevich Prinz, Victor, Alexandrovich Seleznev, Vladimir, Victorovich Prinz, Alexander, Vladimirovich Kopylov, Alexander
• Format: Journal Article
• Language: English
• Published: United States Taylor & Francis 01.06.2009; IOP Publishing; Taylor & Francis Group
• Subjects: Focus Topical Reviews; MEMS/NEMS heterostructures; micro-electro-mechanical systems (MEMS); nano-electro-mechanical systems (NEMS); micro-electro-mechanical systems (MEMS); MEMS/NEMS heterostructures; nano-electro-mechanical systems (NEMS)
• ISSN: 1468-6996; 1878-5514
• DOI: 10.1088/1468-6996/10/3/034502

In this review, we consider the application of solid micro- and nanostructures of various shapes as building blocks for micro-electro-mechanical or nano-electro-mechanical systems (MEMS/NEMS). We provide examples of practical applications of structures created by MEMS/NEMS fabrication. Novel devices are briefly described, such as a high-power electrostatic nanoactuator, a fast-response tubular anemometer for measuring gas and liquid flows, a nanoprinter, a nanosyringe and optical MEMS/NEMS. The prospects are described for achieving NEMS with tunable quantum properties.