退火对Mn-Co-Ni-O薄膜器件性能的影响
采用磁控溅射法制备了厚度为6．5μm的Mn1.95 C00.77Ni0.28O4组分的薄膜材料，把材料分别在400％，500％，600％，700％，800％下进行后退火处理．结果表明，室温下的负电阻温度系数d295值随退火温度增加先增大后减小，而电阻率p295则是随退火温度增加逐渐减小的；在相同频率下，500％退火样品的归一化噪声谱密度（Sv·Vg/V2）最小，700％退火样品的归一化噪声谱密度最大．退火温度越高会造成越多的晶体缺陷，从而降低有效导热系数、增大时间常数丁和器件噪声．...
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| Published in | 红外与毫米波学报 Vol. 35; no. 3; pp. 287 - 293 |
|---|---|
| Main Author | |
| Format | Journal Article |
| Language | Chinese |
| Published |
中国科学院上海技术物理研究所 红外物理国家重点实验室,上海,200083
2016
|
| Subjects | |
| Online Access | Get full text |
| ISSN | 1001-9014 |
| DOI | 10.11972/j.issn.1001-9014.2016.03.007 |
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| Abstract | 采用磁控溅射法制备了厚度为6．5μm的Mn1.95 C00.77Ni0.28O4组分的薄膜材料，把材料分别在400％，500％，600％，700％，800％下进行后退火处理．结果表明，室温下的负电阻温度系数d295值随退火温度增加先增大后减小，而电阻率p295则是随退火温度增加逐渐减小的；在相同频率下，500％退火样品的归一化噪声谱密度（Sv·Vg/V2）最小，700％退火样品的归一化噪声谱密度最大．退火温度越高会造成越多的晶体缺陷，从而降低有效导热系数、增大时间常数丁和器件噪声． |
|---|---|
| AbstractList | TN21; 采用磁控溅射法制备了厚度为6.5 μm的Mn1.95 Co0.77Ni0.28O4组分的薄膜材料,把材料分别在400℃,500℃,600℃,700℃,800℃下进行后退火处理.结果表明,室温下的负电阻温度系数α295值随退火温度增加先增大后减小, 而电阻率p295则是随退火温度增加逐渐减小的;在相同频率下,500℃退火样品的归一化噪声谱密度(SV·VR/V2)最小,700℃退火样品的归一化噪声谱密度最大.退火温度越高会造成越多的晶体缺陷,从而降低有效导热系数、增大时间常数τ和器件噪声. 采用磁控溅射法制备了厚度为6．5μm的Mn1.95 C00.77Ni0.28O4组分的薄膜材料，把材料分别在400％，500％，600％，700％，800％下进行后退火处理．结果表明，室温下的负电阻温度系数d295值随退火温度增加先增大后减小，而电阻率p295则是随退火温度增加逐渐减小的；在相同频率下，500％退火样品的归一化噪声谱密度（Sv·Vg/V2）最小，700％退火样品的归一化噪声谱密度最大．退火温度越高会造成越多的晶体缺陷，从而降低有效导热系数、增大时间常数丁和器件噪声． |
| Author | 张飞 欧阳程 周炜 吴敬 高艳卿 黄志明 |
| AuthorAffiliation | 中国科学院上海技术物理研究所红外物理国家重点实验室,上海200083 |
| AuthorAffiliation_xml | – name: 中国科学院上海技术物理研究所 红外物理国家重点实验室,上海,200083 |
| Author_FL | ZHOU Wei WU Jing GAO Yan-Qing ZHANG Fei OUYANG Cheng HUANG Zhi-Ming |
| Author_FL_xml | – sequence: 1 fullname: ZHANG Fei – sequence: 2 fullname: OUYANG Cheng – sequence: 3 fullname: ZHOU Wei – sequence: 4 fullname: WU Jing – sequence: 5 fullname: GAO Yan-Qing – sequence: 6 fullname: HUANG Zhi-Ming |
| Author_xml | – sequence: 1 fullname: 张飞 欧阳程 周炜 吴敬 高艳卿 黄志明 |
| BookMark | eNo9j09LwzAchnOY4Jz7EoJ4SsyvaZLmKMV_MN1l95E2zdrhUl2RsdvE4c2TICjeFTyIF0Fk38a6-S2sTDy98PLwvjxrqOZylyC0CZQAKOlt90lWFI4ApYAVBZ94FAShjFAqa6j-36-iZlFkEQXpSwUqqCPyPZnML57Ll_cjh8McH2e4vbidLq4eyrunz4-3r8nj4nI2v5-Ws9fy5nodrVh9UiTNv2ygzt5uJzzArfb-YbjTwjFXEjPfN2A4GBvLhHEvEpCIKPaMLzgPtNHUai8JRECt0NoDSxWzVsrAKMZjw1kDbS1nR9pZ7Xrdfn4-dNVhNx2N00H0q0dZJVeRG0syTnPXO8sq9nSYDfRw3BUiUIIx8NkPKo1gjA |
| ClassificationCodes | TN21 |
| ContentType | Journal Article |
| Copyright | Copyright © Wanfang Data Co. Ltd. All Rights Reserved. |
| Copyright_xml | – notice: Copyright © Wanfang Data Co. Ltd. All Rights Reserved. |
| DBID | 2RA 92L CQIGP W92 ~WA 2B. 4A8 92I 93N PSX TCJ |
| DOI | 10.11972/j.issn.1001-9014.2016.03.007 |
| DatabaseName | 维普期刊资源整合服务平台 中文科技期刊数据库-CALIS站点 维普中文期刊数据库 中文科技期刊数据库-工程技术 中文科技期刊数据库- 镜像站点 Wanfang Data Journals - Hong Kong WANFANG Data Centre Wanfang Data Journals 万方数据期刊 - 香港版 China Online Journals (COJ) China Online Journals (COJ) |
| DatabaseTitleList | |
| DeliveryMethod | fulltext_linktorsrc |
| Discipline | Applied Sciences |
| DocumentTitle_FL | Annealing effect on the properties of Mn-Co-Ni-O film detector |
| EndPage | 293 |
| ExternalDocumentID | hwyhmb201603007 668963314 |
| GrantInformation_xml | – fundername: 国家自然科学基金; 上海市基金; 上海技术物理所创新专项; National Natural Science Foundation of China; Shanghai Project; Innovation Project of Shanghai Institute of Technical Physics funderid: (11204336,61274138,61275111,11304336); (12ZR1452200); (Q-ZY-86); (11204336,61274138,61275111,11304336); (12ZR1452200); (Q-ZY-86) |
| GroupedDBID | 2B. 2C0 2RA 5VS 92H 92I 92L ACGFS AENEX ALMA_UNASSIGNED_HOLDINGS CQIGP CW9 DU5 GROUPED_DOAJ IPNFZ KQ8 OK1 RIG RNS TCJ TGT U1G U5S W92 ~WA 4A8 5XA 5XJ 93N ABJNI PSX |
| ID | FETCH-LOGICAL-c597-344d1d51dfc7e352b61e6bc2d46558ada0fa2e8680f6aa21f093ff778d935cd53 |
| ISSN | 1001-9014 |
| IngestDate | Thu May 29 04:20:08 EDT 2025 Wed Feb 14 10:18:41 EST 2024 |
| IsPeerReviewed | true |
| IsScholarly | true |
| Issue | 3 |
| Keywords | 退火温度 Mn1.95Co0.77Ni0.28O4薄膜 detectivty Mn1.95Co0.77 Ni0.28O4 thin films detector properties annealing temperature 响应率 探测率 responsivity 器件性能 |
| Language | Chinese |
| LinkModel | OpenURL |
| MergedId | FETCHMERGED-LOGICAL-c597-344d1d51dfc7e352b61e6bc2d46558ada0fa2e8680f6aa21f093ff778d935cd53 |
| Notes | 31-1577/TN |
| PageCount | 7 |
| ParticipantIDs | wanfang_journals_hwyhmb201603007 chongqing_primary_668963314 |
| PublicationCentury | 2000 |
| PublicationDate | 2016 |
| PublicationDateYYYYMMDD | 2016-01-01 |
| PublicationDate_xml | – year: 2016 text: 2016 |
| PublicationDecade | 2010 |
| PublicationTitle | 红外与毫米波学报 |
| PublicationTitleAlternate | Journal of Infrared and Millimeter Waves |
| PublicationTitle_FL | Journal of Infrared and Millimeter Waves |
| PublicationYear | 2016 |
| Publisher | 中国科学院上海技术物理研究所 红外物理国家重点实验室,上海,200083 |
| Publisher_xml | – name: 中国科学院上海技术物理研究所 红外物理国家重点实验室,上海,200083 |
| SSID | ssib017479198 ssib038074669 ssj0039469 ssib051375082 ssib007291925 ssib002806809 ssib023167203 ssib008143719 ssib000862495 |
| Score | 2.078234 |
| Snippet | 采用磁控溅射法制备了厚度为6．5μm的Mn1.95... TN21; 采用磁控溅射法制备了厚度为6.5 μm的Mn1.95 Co0.77Ni0.28O4组分的薄膜材料,把材料分别在400℃,500℃,600℃,700℃,800℃下进行后退火处理.结果表明,室温下的负电阻温度系数α295值随退火温度增加先增大后减小,... |
| SourceID | wanfang chongqing |
| SourceType | Aggregation Database Publisher |
| StartPage | 287 |
| SubjectTerms | C00.77Ni0.28O4薄膜 Mn1.95 响应率 器件性能 探测率 退火温度 |
| Title | 退火对Mn-Co-Ni-O薄膜器件性能的影响 |
| URI | http://lib.cqvip.com/qk/95821A/201603/668963314.html https://d.wanfangdata.com.cn/periodical/hwyhmb201603007 |
| Volume | 35 |
| hasFullText | 1 |
| inHoldings | 1 |
| isFullTextHit | |
| isPrint | |
| link | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwnR1Na9RAdKgVxIvfYq3KHpyTpGZmkvk4JtmUolgRKvS25LPrwa3aFrGnisWbJ0FQvCt4EC-CSG_-FNfWf-F7k9ndaItfsITszHtv3keS9yZ584aQyyzUuYFpl8eCsvKCys88U2alB55EFBCg-3VuE2QX5cLt4NpyuDx16Esra2ljPZ8rNg9cV_I_VoU2sCuukv0Hy46JQgOcg33hCBaG41_ZmKYGMxXglyoICWkU0zSk0TyNzY2Bl6x6i3e8mzTV1EiqAzzRkpoEgYyhkaZpQOOYxpKmEqlEysIIGneRooksVoh_Y2axBNXddjyLYHFEI24HDnAgpAlEUqQJrCBPCtFjgS1wdMBdGjXjAno4srsdLaGRj6JFgpp00gPkEsuioUZbcgpl0HEb2TArF6iDg6Q_9fg0DpCKgcGT9tuOZhmmvTId98AcYsROETCoYS2mjVUfH4kaWcGAceXkQYNYRYP8yAoAG6tQHw2ABH1qAntiRtpHS145SJ378cecAUxq8QEZwLpO7ti4LpNaNQJDiWsBmjw5gG-ecBsnt3wUZsHh1--2E2tqvribVbQ9kotnmuCGN9tR7vebRnHrOHGEufEImPoomyLAahIwjNM4-w8f9e_m3G5Vbks6HOZKMUysvX6rHeRLt8H55Ft-u2gcTO-YaXkVDSG8mhQZ5FiroZUrgDskBFKO-0MmIOrV46JxAh89NsfBCXGE0JGIV38nIFZX6a8OVu5DzGiX8A3qbLDSijaXTpBjbprYiZp7_iSZ2uyfIsfdlLHjHPLaaTL3fWtr9_G74ftPkxt-78X23tPXw5dvv37--G3rzd6Tnd1X28OdD8Pnz86Qpfl0KVnw3BYoXgEzfU8EQcnKkJV1oSqYKuWSVTIveIlVD3VWZn6d8UqDOmuZZZzVvhF1rZQujQiLMhRnyfRgdVCdI50qyzkrWKUAMFCFyVkRirqUOeclbgo4Q2bH0vfuNZVuelJqcNCCBTOk4_TRc8-_td4v1j__Z5BZchTPmzeYF8j0-oON6iLE9Ov5JXvJ_ACU565E |
| linkProvider | Colorado Alliance of Research Libraries |
| openUrl | ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&rft.genre=article&rft.atitle=%E9%80%80%E7%81%AB%E5%AF%B9Mn-Co-Ni-O%E8%96%84%E8%86%9C%E5%99%A8%E4%BB%B6%E6%80%A7%E8%83%BD%E7%9A%84%E5%BD%B1%E5%93%8D&rft.jtitle=%E7%BA%A2%E5%A4%96%E4%B8%8E%E6%AF%AB%E7%B1%B3%E6%B3%A2%E5%AD%A6%E6%8A%A5&rft.au=%E5%BC%A0%E9%A3%9E&rft.au=%E6%AC%A7%E9%98%B3%E7%A8%8B&rft.au=%E5%91%A8%E7%82%9C&rft.au=%E5%90%B4%E6%95%AC&rft.date=2016&rft.pub=%E4%B8%AD%E5%9B%BD%E7%A7%91%E5%AD%A6%E9%99%A2%E4%B8%8A%E6%B5%B7%E6%8A%80%E6%9C%AF%E7%89%A9%E7%90%86%E7%A0%94%E7%A9%B6%E6%89%80+%E7%BA%A2%E5%A4%96%E7%89%A9%E7%90%86%E5%9B%BD%E5%AE%B6%E9%87%8D%E7%82%B9%E5%AE%9E%E9%AA%8C%E5%AE%A4%2C%E4%B8%8A%E6%B5%B7%2C200083&rft.issn=1001-9014&rft.volume=35&rft.issue=3&rft.spage=287&rft.epage=293&rft_id=info:doi/10.11972%2Fj.issn.1001-9014.2016.03.007&rft.externalDocID=hwyhmb201603007 |
| thumbnail_s | http://utb.summon.serialssolutions.com/2.0.0/image/custom?url=http%3A%2F%2Fimage.cqvip.com%2Fvip1000%2Fqk%2F95821A%2F95821A.jpg http://utb.summon.serialssolutions.com/2.0.0/image/custom?url=http%3A%2F%2Fwww.wanfangdata.com.cn%2Fimages%2FPeriodicalImages%2Fhwyhmb%2Fhwyhmb.jpg |