基底对类金刚石薄膜摩擦学性能的影响

为了研究不同基底对类金刚石薄膜摩擦磨损性能的影响,采用等离子体增强化学气相沉积方法在高速钢、SiC和304不锈钢基底上成功制备了类金刚石薄膜.采用SEM,TEM,Raman测试手段对膜层的微结构进行了表征：SEM表征结果显示膜层总厚度约为6.5 μm,而且层与层之间有明显的界面;TEM表征结果显示沉积的膜层为无定型结构;Raman光谱分析显示沉积的薄膜存在明显的G峰和D峰,可以确定沉积的薄膜为类金刚石薄膜.摩擦测试结果显示,基底对类金刚石薄膜摩擦磨损性能具有显著影响,对于不同基底,钢球对偶上均存在明显的转移膜,高速钢基底的磨痕宽度最小,而且沉积在高速钢基底上的类金刚石薄膜具有最低的磨损率,摩擦...

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Bibliographic Details
Published in河北科技大学学报 Vol. 38; no. 3; pp. 244 - 248
Main Author 张仁辉 赵娟
Format Journal Article
LanguageChinese
Published 铜仁学院材料与化学工程学院,贵州铜仁,554300 2017
Subjects
摩擦学
摩擦系数
类金刚石
diamond-like carbon
Raman
SEM
摩擦学
类金刚石
摩擦系数
TEM
tribology
friction coefficient
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ISSN1008-1542
DOI10.7535/hbkd.2017yx03005

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Summary:为了研究不同基底对类金刚石薄膜摩擦磨损性能的影响,采用等离子体增强化学气相沉积方法在高速钢、SiC和304不锈钢基底上成功制备了类金刚石薄膜.采用SEM,TEM,Raman测试手段对膜层的微结构进行了表征：SEM表征结果显示膜层总厚度约为6.5 μm,而且层与层之间有明显的界面;TEM表征结果显示沉积的膜层为无定型结构;Raman光谱分析显示沉积的薄膜存在明显的G峰和D峰,可以确定沉积的薄膜为类金刚石薄膜.摩擦测试结果显示,基底对类金刚石薄膜摩擦磨损性能具有显著影响,对于不同基底,钢球对偶上均存在明显的转移膜,高速钢基底的磨痕宽度最小,而且沉积在高速钢基底上的类金刚石薄膜具有最低的磨损率,摩擦系数约为0.1.采用Raman光谱对不同基底磨痕表面微结构进行了分析,认为高速钢基底具有最低磨损率可归因于其磨痕的石墨化程度低.研究可为制备具有优异摩擦磨损性能的类金钢石薄膜提供参考.
Bibliography:ZHANG Renhui, ZHAO Juan（School of Material and Chemical Engineering, Tongren University, Tongren, Guizhou 554300？ China）
In order to well investigate the effect of different substrates on the friction and wear of diamond-like carbon （DLC） coating, the DLC coatings are deposited on substrates like the high-speed steel （HSS）, SiC and 304 stainless steel by using plasma enhanced chemical vapor deposition method.The diamond-like carbon is prepared.The microstructure of the coatings is characterized using SEM, TEM and Raman.The SEM results exhibit that the total thickness of the coatings is about 6.5 μm, and there＇s apparent interfaces between layers.The TEM results imply that the coatings have an amorphous structure.Raman spectrum exhibits that G and D peaks are observed, which implies that the deposition coatings are diamond-like carbon coating.The results of tribological tests show that the substrates have a significant effect on the friction and wear of the coating.For different substrates, the transfer film is
ISSN:1008-1542
DOI:10.7535/hbkd.2017yx03005