VC／Ni纳米叠层薄膜的制备及力学性能

采用中频脉冲磁控溅射双靶交替沉积，制备了调制周期为4nm，12nm和88nm的VC／Ni纳米叠层薄膜以及纯VC薄膜。利用XRD和SEM对薄膜结构进行分析，并通过纳米压痕和维氏压痕对薄膜的硬度、模量以及韧性进行了表征。结果表明：双靶交替沉积制备的VC／Ni纳米叠层薄膜界面清晰、薄膜生长比较致密；三种周期的叠层薄膜硬度均为20GPa，与纯VC薄膜相比韧性得到了明显的改善；随着调制周期的增加，发现VC／Ni纳米叠层薄膜的硬度先增大后减小，韧性先降低，后提高，存在一个性能转折的临界周期。...

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Bibliographic Details
Published in航空材料学报 Vol. 34; no. 1; pp. 39 - 45
Main Author 周小军 易健宏 倪成林 徐成竹 黄峰 张学东 徐英
Format Journal Article
LanguageChinese
Published 昆明理工大学材料科学与工程学院,昆明650093 2014
中国科学院海洋新材料与应用技术重点实验室,浙江宁波315201%昆明理工大学材料科学与工程学院,昆明,650093%中国科学院海洋新材料与应用技术重点实验室,浙江宁波,315201%贵州新安航空机械有限责任公司,贵州安顺,561003
Subjects
Ni
VC
磁控溅射交替沉积
纳米叠层
调制周期
韧性
modulation period
韧性
VC/Ni
纳米叠层
magnetron sputtering alternating deposition
nano-laminated
toughness
调制周期
磁控溅射交替沉积
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Summary:采用中频脉冲磁控溅射双靶交替沉积，制备了调制周期为4nm，12nm和88nm的VC／Ni纳米叠层薄膜以及纯VC薄膜。利用XRD和SEM对薄膜结构进行分析，并通过纳米压痕和维氏压痕对薄膜的硬度、模量以及韧性进行了表征。结果表明：双靶交替沉积制备的VC／Ni纳米叠层薄膜界面清晰、薄膜生长比较致密；三种周期的叠层薄膜硬度均为20GPa，与纯VC薄膜相比韧性得到了明显的改善；随着调制周期的增加，发现VC／Ni纳米叠层薄膜的硬度先增大后减小，韧性先降低，后提高，存在一个性能转折的临界周期。
Bibliography:VC/Ni nano-laminated coatings with modulation period of 4nm, 12nm, 88nm and pure VC were prepared by ahernating dual-target MF pulsed magnetron sputtering deposition. The mierostructure of those coatings was analyzed by X-ray diffraction （XRD） and scanning electron microscopy （SEM）. Nanoindentation and Vickers indentation were used for characterizing the hardness, Indentation modulus and toughness, which show that all the VC/Ni nano-laminated structural coatings have a clear interface and being in a dense structure. The hardness of all coatings are about 20GPa which is less than the hardness of pure VC coating. On the contrary, the toughness of those VC/Ni coatings is better than the pure VC coating.
11-3159/V
ZHOU Xiao-jun, YIJlan-hong , NI Cheng-lin, XU Cheng-zhu, HUANG Feng, ZHANG Xue-dong, XU Ying （ 1. College of Materials Science and Engineering, Kunming University of Science and Technology,Kunming 650093, China; 2. Key Laboratory of Marine New Materials and Related Technology, Chinese Academy of Sciences,
ISSN:1005-5053
DOI:10.3969/j.issn.1005-5053.2014.1.007