高深宽比金属光栅制备及中红外波段传感特性

利用纳米压印结合溅射和反应离子刻蚀工艺制备了具有高深宽比的金光栅,使用傅里叶变换红外光谱仪测得了反射谱线.测量结果显示,只在p偏振光垂直于光栅矢量方向入射条件下才存在共振反射峰,证明了＂伪表面等离子体激元波＂的存在.基于严格耦合波分析理论计算了金属光栅的反射率,研究了其作为中红外波段波长调制型表面等离子体共振传感器的可行性.数值计算表明负级次衍射光波对应的共振反射峰的移动能获得较高的波长灵敏度.对于深宽比为10的金光栅结构,＋1级次和-3级次衍射光波对应的波长灵敏度分别为1600 nm/RIU和5000 nm/RIU,品质因子分别为20 RIU-1和60 RIU-1....

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Bibliographic Details
Published in红外与毫米波学报 Vol. 32; no. 2; pp. 154 - 159
Main Author 郑改革 陈云云 徐林华 赖敏
Format Journal Article
LanguageChinese
Published 南京信息工程大学物理与光电工程学院应用物理系 江苏南京210044 2013
Subjects
严格耦合波理论
表面等离子体共振传感器
高深宽比金属光栅
严格耦合波理论
高深宽比金属光栅
表面等离子体共振传感器
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ISSN1001-9014
DOI10.3724/SP.J.1010.2013.00154

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Summary:利用纳米压印结合溅射和反应离子刻蚀工艺制备了具有高深宽比的金光栅,使用傅里叶变换红外光谱仪测得了反射谱线.测量结果显示,只在p偏振光垂直于光栅矢量方向入射条件下才存在共振反射峰,证明了＂伪表面等离子体激元波＂的存在.基于严格耦合波分析理论计算了金属光栅的反射率,研究了其作为中红外波段波长调制型表面等离子体共振传感器的可行性.数值计算表明负级次衍射光波对应的共振反射峰的移动能获得较高的波长灵敏度.对于深宽比为10的金光栅结构,＋1级次和-3级次衍射光波对应的波长灵敏度分别为1600 nm/RIU和5000 nm/RIU,品质因子分别为20 RIU-1和60 RIU-1.
Bibliography:31-1577/TN
high aspect ratio metallic gratings;surface plasmon resonance sensor;rigorous coupled wave analysis
A method for fabricating high aspect ratio （HAR） metallic gratings using nanoimprint together with sputtering and reactive-ion etching （RIE） was introduced. The reflection spectrum is measured by Fourier transform infrared （ FT- IR） spectrometer in the mid-infrared （Mid-IR） region. The reflection peaks will appear just when the p-polarized light incident normally to the grating vector direction, which is very similar to the phenomenon of surface plasmon resonance. This is the so-called spoof surface plasmon resonance （SSPR）. Theoretical analysis based on rigorous coupled wave showed that spoof surface plasmon resonance is very sensitive to the change of refractive index in the surface of the metal. Thus this phenomenon has its potential use as a refractive index sensor. In addition, the shift of resonance wavelength with the refractive index of the metal surface is completely linear. The refractive ind
ISSN:1001-9014
DOI:10.3724/SP.J.1010.2013.00154