类金刚石膜研究进展

类金刚石膜具有高硬度、高热导率、低摩擦因数、良好的耐磨性能和化学惰性等优异的物化性能,在热沉、微电子、抗核加固、生物和汽车工业等领域具有重大的应用前景,近年来吸引了众多研究和关注。文章综述了类金刚石膜的研究进展和膜的成核机理,展示了类金刚石的应用前景,为该材料的研究和工业化应用提供思路和参考。...

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Bibliographic Details
Published in材料工程 Vol. 45; no. 3; pp. 119 - 128
Main Author 陈青云 施凯敏 苏敏华 吕会议 罗瑜 曾陈
Format Journal Article
LanguageChinese
Published 西南科技大学核废物与环境安全国防重点学科实验室,四川绵阳621010 2017
香港大学工学院土木工程系,中国香港999077%香港大学工学院土木工程系,中国香港,999077%西南科技大学核废物与环境安全国防重点学科实验室,四川绵阳,621010
Subjects
成膜机理
摩擦性能
类金刚石膜
结合力
结合力
摩擦性能
deposition mechanism
diamond-like carbon
adhesion
类金刚石膜
成膜机理
tribological property
Online AccessGet full text
ISSN1001-4381
1001-4381
DOI10.11868/j.issn.1001-4381.2015.000229

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Summary:类金刚石膜具有高硬度、高热导率、低摩擦因数、良好的耐磨性能和化学惰性等优异的物化性能,在热沉、微电子、抗核加固、生物和汽车工业等领域具有重大的应用前景,近年来吸引了众多研究和关注。文章综述了类金刚石膜的研究进展和膜的成核机理,展示了类金刚石的应用前景,为该材料的研究和工业化应用提供思路和参考。
Bibliography:11-1800/TB
diamond-like carbon; deposition mechanism; adhesion; tribological property
Diamond-like carbon（DLC）films had many unique and outstanding properties such as high thermal conductivity,high hardness,excellent chemical inertness,low friction coefficients and wear coefficients.The properties and combinations were very promising for heat sink,micro-electromechanical devices,radiation hardening,biomedical devices,automotive industry and other technical applications,more research and a lot of attention were attracted in recent years.The research progress of diamond-like films and the nucleation mechanism of film were summarized,and application prospect of DLC films were demonstrated.The aim of this paper is to provide insights on the research trend of DLC films and the industry applications.
CHEN Qing-yun1,2,SHI Kai-min2,SU Min-hua2,LYU Hui-yi1,LUO Yu1,ZENG Chen1（1 Key Subject Laboratory of National Defense for Radioactive Waste and Environmental Security,Southwest University of Science and Technology,Mianyan
ISSN:1001-4381
1001-4381
DOI:10.11868/j.issn.1001-4381.2015.000229