Silicon end-effectors for microgripping tasks

• Published in: Precision engineering Vol. 33; no. 4; pp. 542 - 548
• Main Authors: Agnus, Joël, Hériban, David, Gauthier, Michaël, Pétrini, Valérie
• Format: Journal Article
• Language: English
• Published: New York, NY Elsevier Inc 01.10.2009; Elsevier
• Subjects: Applied sciences; End-effectors; Engineering Sciences; Exact sciences and technology; Instruments, apparatus, components and techniques common to several branches of physics and astronomy; Mechanical engineering. Machine design; Mechanical instruments, equipment and techniques; MEMS assembly; Micro and nanotechnologies; Microelectronics; Microgripper; Micromanipulation; Micromechanical devices and systems; Physics; Precision engineering, watch making; MEMS assembly; Microgripper; Micromanipulation; End-effectors; Piezoelectric sensor; Precision engineering; Experimental study; Reactive ion etching; Gripper; Piezoelectric actuators; Ion beam etching; Silicon; Microelectromechanical device; micromanipulation; end-effectors

Micromanipulation is a key task to perform serial assembly of MEMS. The two-fingered microgrippers are usable but require specific studies to be able to work in the microworld. In this paper, we propose a new microgripping system where actuators and the end-effectors of the gripper are fabricated se...