Silicon end-effectors for microgripping tasks

• Published in: Precision engineering Vol. 33; no. 4; pp. 542 - 548
• Main Authors: Agnus, Joël, Hériban, David, Gauthier, Michaël, Pétrini, Valérie
• Format: Journal Article
• Language: English
• Published: New York, NY Elsevier Inc 01.10.2009; Elsevier
• Subjects: Applied sciences; End-effectors; Engineering Sciences; Exact sciences and technology; Instruments, apparatus, components and techniques common to several branches of physics and astronomy; Mechanical engineering. Machine design; Mechanical instruments, equipment and techniques; MEMS assembly; Micro and nanotechnologies; Microelectronics; Microgripper; Micromanipulation; Micromechanical devices and systems; Physics; Precision engineering, watch making; MEMS assembly; Microgripper; Micromanipulation; End-effectors; Piezoelectric sensor; Precision engineering; Experimental study; Reactive ion etching; Gripper; Piezoelectric actuators; Ion beam etching; Silicon; Microelectromechanical device; micromanipulation; end-effectors
• ISSN: 0141-6359; 1873-2372
• DOI: 10.1016/j.precisioneng.2009.02.005

Micromanipulation is a key task to perform serial assembly of MEMS. The two-fingered microgrippers are usable but require specific studies to be able to work in the microworld. In this paper, we propose a new microgripping system where actuators and the end-effectors of the gripper are fabricated separately. End-effectors can thus be adapted to the manipulated micro-objects without new design and/or fabrication of the actuator. The assembly of the end-effectors on our piezoelectric actuators guarantee a great modularity for the system. This paper focuses on the original design, development and experimentation of new silicon end-effectors, compatible with our piezoelectric actuator. These innovative end-effectors are realized with the well known DRIE process and are able to perform micromanipulation tasks of objects whose typical size is between 5 μ m and 1 mm.