MEMS vibrational energy harvesters

• Published in: Science and technology of advanced materials Vol. 20; no. 1; pp. 124 - 143
• Main Authors: Toshiyoshi, Hiroshi, Ju, Suna, Honma, Hiroaki, Ji, Chang-Hyeon, Fujita, Hiroyuki
• Format: Journal Article
• Language: English
• Published: United States Taylor & Francis 01.01.2019; Taylor & Francis Ltd; Taylor & Francis Group
• Subjects: 201 Electronics / Semiconductor / TCOs; 206 Energy conversion / transport / storage / recovery; 208 Sensors and actuators; 400 Modeling / Simulations; 60 New topics / Others; Electromagnetic induction; energy harvester; Energy harvesting; Focus on Energy Harvesting - Science, Technology, Application and Metrology; Impedance matching; MEMS; microelectro-mechanical system; Microelectromechanical systems; Piezoelectricity; Q factors; velocity-damped resonant generator; 400 Modeling / Simulations; 60 New topics / Others; velocity-damped resonant generator; microelectro-mechanical system; 201 Electronics / Semiconductor / TCOs; 206 Energy conversion / transport / storage / recovery; MEMS; energy harvester; 208 Sensors and actuators
• ISSN: 1468-6996; 1878-5514
• DOI: 10.1080/14686996.2019.1569828

In this paper, we look into the fundamental mechanism to retrieve the power from physical vibrations by using microelectromechanical systems (MEMS) energy harvesters. An analytical model is presented for the velocity-damped resonant generator (VDRG) that delivers electrical power through the power enhancement mechanism using the mechanical resonance of a suspended mass. Deliverable power is also analytically discussed with respect to the theoretical limit, and a view to understand the VDRG behaviors is presented in association with the impedance matching condition and the quality factors. Mechano-electric power conversions including electrostatic induction, electromagnetic induction, and piezoelectric effect are discussed to study the scaling effect. Recent examples of MEMS VDRGs are reviewed and evaluated in terms of the power density.