Optical Emission Spectroscopic (OES) analysis for diagnostics of electron density and temperature in non-equilibrium argon plasma based on collisional-radiative model

• Published in: Advances in physics: X Vol. 4; no. 1; p. 1592707
• Main Author: Akatsuka, Hiroshi
• Format: Journal Article
• Language: English
• Published: Abingdon Taylor & Francis 01.01.2019; Taylor & Francis Ltd; Taylor & Francis Group
• Subjects: 52.25.Os (Emission of electromagnetic radiation); 52.70.-m (Plasma diagnostic techniques and instrumentation); 52.70.Kz (Optical (ultraviolet; Ar plasma; Argon; Argon plasma; collisional radiative model; Electron density; Electron energy; electron temperature; Electrons; Emission analysis; Emission spectroscopy; Equilibrium; infrared) measurements; Non-equilibrium atmospheric-plasma; Nonequilibrium plasmas; Optical emission spectroscopy; optical emission spectroscopy (OES); Plasma; Population distribution; Temperature; visible
• ISSN: 2374-6149; 2374-6149
• DOI: 10.1080/23746149.2019.1592707

This paper describes the use of Optical Emission Spectroscopy (OES) to measure electron densities and temperatures in non-equilibrium plasmas. The ways to interpret relative line-intensities of neutral argon atoms are evaluated based upon a collisional-radiative model including atomic collisional processes. A conversion from an excitation temperature determined from relative line intensities assuming a Boltzmann population distribution to the thermal electron temperature in the electron temperature range 1-4 eV and electron density range 10 10 -10 12 cm -3 is given. Procedures to obtain electron temperature T e and density N e of non-equilibrium argon plasma by OES measurement with collisional radiative model.