Low-temperature crystallization of oriented ZnO film using seed layers prepared by sol–gel method

Transparent zinc oxide (ZnO) films were coated on seed layers prepared by the sol–gel method by chemical solution deposition method. Firstly, seed layers were prepared from zinc acetate and monoethanolamine, 2-methoxyethanol by the sol–gel method on a silicon substrate or a slide glass. Next, the su...

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Published inJournal of materials science Vol. 46; no. 10; pp. 3537 - 3543
Main Authors Segawa, Hiroyo, Sakurai, Hideaki, Izumi, Reiko, Hayashi, Toshiharu, Yano, Tetsuji, Shibata, Shuichi
Format Journal Article
LanguageEnglish
Published Boston Springer US 01.05.2011
Springer
Springer Nature B.V
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ISSN0022-2461
1573-4803
DOI10.1007/s10853-011-5263-8

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Abstract Transparent zinc oxide (ZnO) films were coated on seed layers prepared by the sol–gel method by chemical solution deposition method. Firstly, seed layers were prepared from zinc acetate and monoethanolamine, 2-methoxyethanol by the sol–gel method on a silicon substrate or a slide glass. Next, the substrate coated with a seed layer was immersed in zinc nitride solution with hexamethylenetetramine, and ZnO films were obtained. The transmittance of the ZnO films depended on the morphology and crystallinity of the seed layers. When the seed layer were dried on a hot plate, the seed layer had flat surface and transparent ZnO film could be obtained on the seed layers dried at temperatures above 200 °C. When the seed layer was prepared from zinc acetate dihydrate dried in a petri dish, the seed layer were smooth without cracks and the transparent ZnO films were obtained at temperature below 100 °C.
AbstractList Transparent zinc oxide (ZnO) films were coated on seed layers prepared by the sol-gel method by chemical solution deposition method. Firstly, seed layers were prepared from zinc acetate and monoethanolamine, 2-methoxyethanol by the sol-gel method on a silicon substrate or a slide glass. Next, the substrate coated with a seed layer was immersed in zinc nitride solution with hexamethylenetetramine, and ZnO films were obtained. The transmittance of the ZnO films depended on the morphology and crystallinity of the seed layers. When the seed layer were dried on a hot plate, the seed layer had flat surface and transparent ZnO film could be obtained on the seed layers dried at temperatures above 200°C. When the seed layer was prepared from zinc acetate dihydrate dried in a petri dish, the seed layer were smooth without cracks and the transparent ZnO films were obtained at temperature below 100°C.
Transparent zinc oxide (ZnO) films were coated on seed layers prepared by the sol--gel method by chemical solution deposition method. Firstly, seed layers were prepared from zinc acetate and monoethanolamine, 2-methoxyethanol by the sol--gel method on a silicon substrate or a slide glass. Next, the substrate coated with a seed layer was immersed in zinc nitride solution with hexamethylenetetramine, and ZnO films were obtained. The transmittance of the ZnO films depended on the morphology and crystallinity of the seed layers. When the seed layer were dried on a hot plate, the seed layer had flat surface and transparent ZnO film could be obtained on the seed layers dried at temperatures above 200 degree C. When the seed layer was prepared from zinc acetate dihydrate dried in a petri dish, the seed layer were smooth without cracks and the transparent ZnO films were obtained at temperature below 100 degree C.
Transparent zinc oxide (ZnO) films were coated on seed layers prepared by the sol–gel method by chemical solution deposition method. Firstly, seed layers were prepared from zinc acetate and monoethanolamine, 2-methoxyethanol by the sol–gel method on a silicon substrate or a slide glass. Next, the substrate coated with a seed layer was immersed in zinc nitride solution with hexamethylenetetramine, and ZnO films were obtained. The transmittance of the ZnO films depended on the morphology and crystallinity of the seed layers. When the seed layer were dried on a hot plate, the seed layer had flat surface and transparent ZnO film could be obtained on the seed layers dried at temperatures above 200 °C. When the seed layer was prepared from zinc acetate dihydrate dried in a petri dish, the seed layer were smooth without cracks and the transparent ZnO films were obtained at temperature below 100 °C.
Transparent zinc oxide (ZnO) films were coated on seed layers prepared by the sol–gel method by chemical solution deposition method. Firstly, seed layers were prepared from zinc acetate and monoethanolamine, 2-methoxyethanol by the sol–gel method on a silicon substrate or a slide glass. Next, the substrate coated with a seed layer was immersed in zinc nitride solution with hexamethylenetetramine, and ZnO films were obtained. The transmittance of the ZnO films depended on the morphology and crystallinity of the seed layers. When the seed layer were dried on a hot plate, the seed layer had flat surface and transparent ZnO film could be obtained on the seed layers dried at temperatures above 200 °C. When the seed layer was prepared from zinc acetate dihydrate dried in a petri dish, the seed layer were smooth without cracks and the transparent ZnO films were obtained at temperature below 100 °C.
Audience Academic
Author Izumi, Reiko
Sakurai, Hideaki
Segawa, Hiroyo
Hayashi, Toshiharu
Shibata, Shuichi
Yano, Tetsuji
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  organization: Exploratory Nanomaterials Research Laboratory, National Institute for Materials Science
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  givenname: Hideaki
  surname: Sakurai
  fullname: Sakurai, Hideaki
  organization: Central Research Institute, Naka Research Center, Mitsubishi Materials Corporation
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  surname: Izumi
  fullname: Izumi, Reiko
  organization: Central Research Institute, Naka Research Center, Mitsubishi Materials Corporation
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  surname: Hayashi
  fullname: Hayashi, Toshiharu
  organization: Central Research Institute, Naka Research Center, Mitsubishi Materials Corporation
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  surname: Yano
  fullname: Yano, Tetsuji
  organization: Department of Chemistry and Materials Science, Graduate School of Science and Engineering, Tokyo Institute of Technology
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  surname: Shibata
  fullname: Shibata, Shuichi
  organization: Department of Chemistry and Materials Science, Graduate School of Science and Engineering, Tokyo Institute of Technology
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Keywords Monoethanolamine
Plastic Substrate
Zinc Acetate
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Seed Layer
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Snippet Transparent zinc oxide (ZnO) films were coated on seed layers prepared by the sol–gel method by chemical solution deposition method. Firstly, seed layers were...
Transparent zinc oxide (ZnO) films were coated on seed layers prepared by the sol-gel method by chemical solution deposition method. Firstly, seed layers were...
Transparent zinc oxide (ZnO) films were coated on seed layers prepared by the sol--gel method by chemical solution deposition method. Firstly, seed layers were...
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SubjectTerms Analysis
Characterization and Evaluation of Materials
Chemistry and Materials Science
Classical Mechanics
Copper
Cracks
Crystallinity
Crystallization
Crystallography and Scattering Methods
Deposition
Ethanolamines
Flat surfaces
Glass substrates
Hexamethylenetetramine
High tech industries
Low temperature
Materials Science
Methods
Methyl cellosolve
Monoethanolamine (MEA)
Morphology
Nitrides
Organic chemistry
Polymer Sciences
Seeds
Silicon substrates
Sol-gel processes
Solid Mechanics
Transmittance
Zinc acetate
Zinc nitride
Zinc oxide
Zinc oxides
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Title Low-temperature crystallization of oriented ZnO film using seed layers prepared by sol–gel method
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