Low-temperature crystallization of oriented ZnO film using seed layers prepared by sol–gel method

Transparent zinc oxide (ZnO) films were coated on seed layers prepared by the sol–gel method by chemical solution deposition method. Firstly, seed layers were prepared from zinc acetate and monoethanolamine, 2-methoxyethanol by the sol–gel method on a silicon substrate or a slide glass. Next, the su...

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Bibliographic Details
Published inJournal of materials science Vol. 46; no. 10; pp. 3537 - 3543
Main Authors Segawa, Hiroyo, Sakurai, Hideaki, Izumi, Reiko, Hayashi, Toshiharu, Yano, Tetsuji, Shibata, Shuichi
Format Journal Article
LanguageEnglish
Published Boston Springer US 01.05.2011
Springer
Springer Nature B.V
Subjects
Analysis
Characterization and Evaluation of Materials
Chemistry and Materials Science
Classical Mechanics
Copper
Cracks
Crystallinity
Crystallization
Crystallography and Scattering Methods
Deposition
Ethanolamines
Flat surfaces
Glass substrates
Hexamethylenetetramine
High tech industries
Low temperature
Materials Science
Methods
Methyl cellosolve
Monoethanolamine (MEA)
Morphology
Nitrides
Organic chemistry
Polymer Sciences
Seeds
Silicon substrates
Sol-gel processes
Solid Mechanics
Transmittance
Zinc acetate
Zinc nitride
Zinc oxide
Zinc oxides
Monoethanolamine
Plastic Substrate
Zinc Acetate
Wako Pure Chemical Industry
Seed Layer
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Summary:Transparent zinc oxide (ZnO) films were coated on seed layers prepared by the sol–gel method by chemical solution deposition method. Firstly, seed layers were prepared from zinc acetate and monoethanolamine, 2-methoxyethanol by the sol–gel method on a silicon substrate or a slide glass. Next, the substrate coated with a seed layer was immersed in zinc nitride solution with hexamethylenetetramine, and ZnO films were obtained. The transmittance of the ZnO films depended on the morphology and crystallinity of the seed layers. When the seed layer were dried on a hot plate, the seed layer had flat surface and transparent ZnO film could be obtained on the seed layers dried at temperatures above 200 °C. When the seed layer was prepared from zinc acetate dihydrate dried in a petri dish, the seed layer were smooth without cracks and the transparent ZnO films were obtained at temperature below 100 °C.
Bibliography:ObjectType-Article-1
SourceType-Scholarly Journals-1
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ISSN:0022-2461
1573-4803
DOI:10.1007/s10853-011-5263-8