Gallium–tin alloys as a low melting point liquid metal for repetition-pulse-laser-induced high energy density state toward compact pulse EUV sources

Here, we show the easy-handling of a liquid gallium–tin alloy (Ga : Sn) as a laser target source for 13.5 nm light generation. The alloys have ∼30 °C freezing points according to a differential scanning calorimetry cooling process. A Nd:YAG laser (1064 nm, 1 ns, 7.1 × 10 10 W cm −2 ) ablated the all...

Full description

Saved in:
Bibliographic Details
Published inRSC advances Vol. 9; no. 24; pp. 13927 - 13932
Main Authors Andrew Musgrave, Christopher Stephen, Lu, Nan, Sato, Rie, Nagai, Keiji
Format Journal Article
LanguageEnglish
Published England Royal Society of Chemistry 01.01.2019
The Royal Society of Chemistry
Subjects
Ablation
Alloys
Chemistry
differential scanning calorimetry
droplets
emissions factor
energy density
Flux density
Freezing
Gallium
Laser cooling
Lasers
liquids
melting point
Melting points
Neodymium lasers
Nozzles
Repetition
Semiconductor lasers
Tin
Tin base alloys
Ultraviolet emission
YAG lasers
Online AccessGet full text
ISSN2046-2069
2046-2069
DOI10.1039/C9RA01905G

Cover

More Information
Summary:Here, we show the easy-handling of a liquid gallium–tin alloy (Ga : Sn) as a laser target source for 13.5 nm light generation. The alloys have ∼30 °C freezing points according to a differential scanning calorimetry cooling process. A Nd:YAG laser (1064 nm, 1 ns, 7.1 × 10 10 W cm −2 ) ablated the alloys, obtaining a similar extreme ultraviolet emission intensity to Sn despite a small quantity of Sn. Finally, we demonstrate a liquid metal alloy jet and droplets using a plastic nozzle for high-repetition target supply.
Bibliography:ObjectType-Article-1
SourceType-Scholarly Journals-1
ObjectType-Feature-2
content type line 14
content type line 23
Present address: Centre of Micro/Nano Manufacturing Technology (MNMT-Dublin), University College Dublin, D14 YH57, Dublin, Ireland.
ISSN:2046-2069
2046-2069
DOI:10.1039/C9RA01905G