Chip-integrated metasurface full-Stokes polarimetric imaging sensor

• Published in: Light, science & applications Vol. 12; no. 1; p. 218
• Main Authors: Zuo, Jiawei, Bai, Jing, Choi, Shinhyuk, Basiri, Ali, Chen, Xiahui, Wang, Chao, Yao, Yu
• Format: Journal Article
• Language: English
• Published: London Nature Publishing Group UK 06.09.2023; Springer Nature B.V; Nature Publishing Group
• Subjects: 142/126; 639/624/1075/401; 639/624/1107/510; 639/766/400/1021; Lasers; Microwaves; Optical and Electronic Materials; Optical Devices; Optics; OTHER INSTRUMENTATION; Photonics; Physics; Physics and Astronomy; RF and Optical Engineering; Sensors; Visual field
• ISSN: 2047-7538; 2095-5545; 2047-7538
• DOI: 10.1038/s41377-023-01260-w

Polarimetric imaging has a wide range of applications for uncovering features invisible to human eyes and conventional imaging sensors. Chip-integrated, fast, cost-effective, and accurate full-Stokes polarimetric imaging sensors are highly desirable in many applications, which, however, remain elusive due to fundamental material limitations. Here we present a chip-integrated Meta surface-based Full-Stokes Polar imetric Im aging sensor (MetaPolarIm) realized by integrating an ultrathin (~600 nm) metasurface polarization filter array (MPFA) onto a visible imaging sensor with CMOS compatible fabrication processes. The MPFA is featured with broadband dielectric-metal hybrid chiral metasurfaces and double-layer nanograting polarizers. This chip-integrated polarimetric imaging sensor enables single-shot full-Stokes imaging (speed limited by the CMOS imager) with the most compact form factor, records high measurement accuracy, dual-color operation (green and red) and a field of view up to 40 degrees. MetaPolarIm holds great promise to enable transformative applications in autonomous vision, industry inspection, space exploration, medical imaging and diagnosis. We present a chip-integrated Meta surface-based Full-Stokes Polar imetric Im aging sensor (MetaPolarIm) with ultra-compactness, record high measurement accuracy, dual color operation, and a field of view up to 40 degrees.