Towards micro-assembly of hybrid MOEMS components on a reconfigurable silicon free-space micro-optical bench

• Published in: Journal of micromechanics and microengineering Vol. 20; no. 4; p. 045012
• Main Authors: Bargiel, S, Rabenorosoa, K, Clévy, C, Gorecki, C, Lutz, P
• Format: Journal Article
• Language: English
• Published: Bristol IOP Publishing 01.04.2010; Institute of Physics
• Subjects: Applied sciences; Assembly; Benches; Circuit properties; Electric, optical and optoelectronic circuits; Electronics; Engineering Sciences; Exact sciences and technology; Instruments, apparatus, components and techniques common to several branches of physics and astronomy; Integrated optics. Optical fibers and wave guides; Mechanical engineering. Machine design; Mechanical instruments, equipment and techniques; Micro and nanotechnologies; Microelectronic fabrication (materials and surfaces technology); Microelectronics; Micromachining; Micromechanical devices and systems; Micromechanics; Optical and optoelectronic circuits; Optics; Photonic; Physics; Precision engineering, watch making; Rails; Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices; Silicon; Three dimensional; Wafers; Integrated optics; Optical component; Precision engineering; Optical bench; Microoptics; Robotics; Silicon on insulator technology; Microlens; Gripper; Rail; Active system; Silicon; Micromanipulation; Mirror; Microelectromechanical device; Micromirrors; Production process; MOB; hybrid integration; MOEMS; Micro-assembly; silicon micromachining; micro-optical bench
• ISSN: 0960-1317; 1361-6439
• DOI: 10.1088/0960-1317/20/4/045012

The 3D integration of hybrid chips is a viable approach for the micro-optical technologies to reduce the costs of assembly and packaging. In this paper a technology platform for the hybrid integration of MOEMS components on a reconfigurable silicon free-space micro-optical bench (FS-MOB) is presented. In this approach a desired optical component (e.g. micromirror, microlens) is integrated with a removable and adjustable silicon holder which can be manipulated, aligned and fixed in the precisely etched rail of the silicon baseplate by use of a robotic micro-assembly station. An active-based gripping system allows modification of the holder position on the baseplate with nanometre precision. The fabrication processes of the micromachined parts of the micro-optical bench, based on bulk micromachining of standard silicon wafer and SOI wafer, are described. The successful assembly of the holders, equipped with a micromirror and a refractive glass ball microlens, on the baseplate rail is demonstrated.