Optical metrology embraces deep learning: keeping an open mind

Optical metrology practitioners ought to embrace deep learning with an open mind, while devote continuing efforts to look for its theoretical groundwork and maintain an awareness of its limits.

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Bibliographic Details
Published inLight, science & applications Vol. 11; no. 1; p. 139
Main Author Pan, Bing
Format Journal Article
LanguageEnglish
Published London Nature Publishing Group UK 17.05.2022
Springer Nature B.V
Nature Publishing Group
Subjects
639/624/1107/510
639/624/1111/1116
Applied and Technical Physics
Atomic
Classical and Continuum Physics
Deep learning
Lasers
Molecular
News & Views
news-and-views
Optical and Plasma Physics
Optical Devices
Optics
Photonics
Physics
Physics and Astronomy
Views
Online AccessGet full text

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More Information
Summary:Optical metrology practitioners ought to embrace deep learning with an open mind, while devote continuing efforts to look for its theoretical groundwork and maintain an awareness of its limits.
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ISSN:2047-7538
2095-5545
2047-7538
DOI:10.1038/s41377-022-00829-1