Polarity Inversion of Aluminum Nitride Thin Films by using Si and MgSi Dopants
Polarity is among the critical characteristics that could governs the functionality of piezoelectric materials. In this study, the polarity of aluminum nitride (AlN) thin films was inverted from Al-polar to N-polar by doping Si into AlN in the range of 1–15 at.%. Polarity inversion from Al-polar to...
Saved in:
| Published in | Scientific reports Vol. 10; no. 1; p. 4369 |
|---|---|
| Main Authors | , , , , |
| Format | Journal Article |
| Language | English |
| Published |
London
Nature Publishing Group UK
09.03.2020
Nature Publishing Group |
| Subjects | |
| Online Access | Get full text |
Cover
Loading…
| Abstract | Polarity is among the critical characteristics that could governs the functionality of piezoelectric materials. In this study, the polarity of aluminum nitride (AlN) thin films was inverted from Al-polar to N-polar by doping Si into AlN in the range of 1–15 at.%. Polarity inversion from Al-polar to N-polar also occurred when MgSi was codoped into AlN with Mg to Si ratio was less than 1. However, the polarity can be reversed from N-polar to Al-polar when the ratio of Mg and Si was greater than 1. The effect of Si and MgSi addition was investigated with regards to their crystal structure, lattice parameters, polarity distribution and the oxidation state of each elements. Furthermore, the effect of intermediate layer as well as the presence of point defect (i.e. aluminum vacancy) were investigated and how these factors influence the polarity of the thin films are discussed in this report. |
|---|---|
| AbstractList | Polarity is among the critical characteristics that could governs the functionality of piezoelectric materials. In this study, the polarity of aluminum nitride (AlN) thin films was inverted from Al-polar to N-polar by doping Si into AlN in the range of 1–15 at.%. Polarity inversion from Al-polar to N-polar also occurred when MgSi was codoped into AlN with Mg to Si ratio was less than 1. However, the polarity can be reversed from N-polar to Al-polar when the ratio of Mg and Si was greater than 1. The effect of Si and MgSi addition was investigated with regards to their crystal structure, lattice parameters, polarity distribution and the oxidation state of each elements. Furthermore, the effect of intermediate layer as well as the presence of point defect (i.e. aluminum vacancy) were investigated and how these factors influence the polarity of the thin films are discussed in this report. Polarity is among the critical characteristics that could governs the functionality of piezoelectric materials. In this study, the polarity of aluminum nitride (AlN) thin films was inverted from Al-polar to N-polar by doping Si into AlN in the range of 1-15 at.%. Polarity inversion from Al-polar to N-polar also occurred when MgSi was codoped into AlN with Mg to Si ratio was less than 1. However, the polarity can be reversed from N-polar to Al-polar when the ratio of Mg and Si was greater than 1. The effect of Si and MgSi addition was investigated with regards to their crystal structure, lattice parameters, polarity distribution and the oxidation state of each elements. Furthermore, the effect of intermediate layer as well as the presence of point defect (i.e. aluminum vacancy) were investigated and how these factors influence the polarity of the thin films are discussed in this report.Polarity is among the critical characteristics that could governs the functionality of piezoelectric materials. In this study, the polarity of aluminum nitride (AlN) thin films was inverted from Al-polar to N-polar by doping Si into AlN in the range of 1-15 at.%. Polarity inversion from Al-polar to N-polar also occurred when MgSi was codoped into AlN with Mg to Si ratio was less than 1. However, the polarity can be reversed from N-polar to Al-polar when the ratio of Mg and Si was greater than 1. The effect of Si and MgSi addition was investigated with regards to their crystal structure, lattice parameters, polarity distribution and the oxidation state of each elements. Furthermore, the effect of intermediate layer as well as the presence of point defect (i.e. aluminum vacancy) were investigated and how these factors influence the polarity of the thin films are discussed in this report. |
| ArticleNumber | 4369 |
| Author | Akiyama, Morito Anggraini, Sri Ayu Yamada, Hiroshi Hirata, Kenji Uehara, Masato |
| Author_xml | – sequence: 1 givenname: Sri Ayu surname: Anggraini fullname: Anggraini, Sri Ayu email: ayu-anggraini@aist.go.jp organization: Advanced Manufacturing Research Institute (AMRI), National Institute of Advanced Industrial Science and Technology (AIST) – sequence: 2 givenname: Masato surname: Uehara fullname: Uehara, Masato organization: Advanced Manufacturing Research Institute (AMRI), National Institute of Advanced Industrial Science and Technology (AIST) – sequence: 3 givenname: Kenji surname: Hirata fullname: Hirata, Kenji organization: Advanced Manufacturing Research Institute (AMRI), National Institute of Advanced Industrial Science and Technology (AIST) – sequence: 4 givenname: Hiroshi surname: Yamada fullname: Yamada, Hiroshi organization: Advanced Manufacturing Research Institute (AMRI), National Institute of Advanced Industrial Science and Technology (AIST) – sequence: 5 givenname: Morito surname: Akiyama fullname: Akiyama, Morito organization: Advanced Manufacturing Research Institute (AMRI), National Institute of Advanced Industrial Science and Technology (AIST) |
| BackLink | https://www.ncbi.nlm.nih.gov/pubmed/32152367$$D View this record in MEDLINE/PubMed |
| BookMark | eNp9kU1LHTEYhUOxVGv9A12UQDfdTJvvj01BtFpBbaF2HXKTzDUyk9wmM8L9941evxdmk0Ceczjve96DrZRTAOAjRl8xoupbZZhr1SGCOoGJ4p16A3YIYrwjlJCtJ-9tsFfrFWqHE82wfge2KcGcUCF3wPnvPNgSpzU8Sdeh1JgTzD3cH-YxpnmE53Eq0Qd4cRkTPIrDWOFiDeca0xL-idAmD8-W7XGYVzZN9QN429uhhr27exf8PfpxcfCzO_11fHKwf9o5ztDUCSEpk8wLjlgfrNbYCU68XahAmfbEEued0Bj3ngpBLbUOOSmR8s63sXq6C75vfFfzYgzehTQVO5hViaMta5NtNM9_Urw0y3xtJBJESt4MvtwZlPxvDnUyY6wuDINNIc_VECq50pwi2tDPL9CrPJfUxrulmNQakUZ9eproIcr9qhugNoArudYSeuPiZKe28BYwDgYjc1Os2RRrWrHmtlijmpS8kN67vyqiG1FtcFqG8hj7FdV_MDq0Ow |
| CitedBy_id | crossref_primary_10_1063_5_0185066 crossref_primary_10_35848_1347_4065_ad25ad crossref_primary_10_1080_10408436_2024_2406247 crossref_primary_10_1016_j_ceramint_2024_11_475 crossref_primary_10_35848_1347_4065_ac124f crossref_primary_10_1016_j_mssp_2023_107736 crossref_primary_10_1007_s10854_022_08648_1 crossref_primary_10_1016_j_scriptamat_2024_116523 crossref_primary_10_1063_5_0171167 crossref_primary_10_1016_j_vacuum_2022_111681 crossref_primary_10_35848_1347_4065_acbc2b crossref_primary_10_1063_5_0106428 crossref_primary_10_35848_1347_4065_adae19 crossref_primary_10_1002_aelm_202400874 crossref_primary_10_1002_crat_202200086 crossref_primary_10_1109_TED_2024_3513932 crossref_primary_10_1016_j_apsusc_2022_154017 crossref_primary_10_1039_D3MA00842H crossref_primary_10_1016_j_ceramint_2021_11_211 crossref_primary_10_5188_ijsmer_25_115 crossref_primary_10_1016_j_apsusc_2021_149461 crossref_primary_10_35848_1347_4065_acc3a6 crossref_primary_10_1016_j_actamat_2020_116495 crossref_primary_10_1063_5_0203417 |
| Cites_doi | 10.1016/S0921-4526(02)00530-6 10.1103/PhysRevB.59.12977 10.1063/1.1915535 10.1016/S1003-6326(14)63417-8 10.1063/1.3524473 10.1116/1.3501117 10.7567/APEX.8.061501 10.1063/1.4874840 10.1021/acsami.6b05830 10.1016/j.jcis.2010.10.043 10.1021/acsomega.8b03489 10.1063/1.1599044 10.1016/j.jallcom.2014.10.018 10.1088/0957-4484/18/10/105601 10.1063/1.2721865 10.1103/PhysRevB.88.085202 10.1016/j.matchar.2005.12.012 10.1063/1.2957654 10.1111/j.1551-2916.2010.03704.x 10.1016/S0040-6090(00)01531-5 10.1063/1.1616191 10.1063/1.2404938 10.1002/pssa.201001123 10.1063/1.4990533 10.1063/1.2405849 10.1016/j.jallcom.2012.02.111 10.1016/j.vacuum.2018.10.067 10.1116/1.2821741 10.1063/1.465758 10.1016/j.matlet.2018.02.091 10.1111/j.1151-2916.1990.tb06444.x 10.1016/j.apsusc.2015.03.120 10.1016/j.scriptamat.2018.09.001 10.1016/0040-6090(88)90398-7 10.1063/1.1318731 10.1063/1.1646222 10.1021/jp304054u 10.1557/JMR.1990.1763 10.1002/adma.200802611 10.1021/acsami.6b03194 10.1002/1521-3951(200111)228:2<505::AID-PSSB505>3.0.CO;2-U |
| ContentType | Journal Article |
| Copyright | The Author(s) 2020 This work is published under http://creativecommons.org/licenses/by/4.0/ (the “License”). Notwithstanding the ProQuest Terms and Conditions, you may use this content in accordance with the terms of the License. |
| Copyright_xml | – notice: The Author(s) 2020 – notice: This work is published under http://creativecommons.org/licenses/by/4.0/ (the “License”). Notwithstanding the ProQuest Terms and Conditions, you may use this content in accordance with the terms of the License. |
| DBID | C6C AAYXX CITATION NPM 3V. 7X7 7XB 88A 88E 88I 8FE 8FH 8FI 8FJ 8FK ABUWG AEUYN AFKRA AZQEC BBNVY BENPR BHPHI CCPQU DWQXO FYUFA GHDGH GNUQQ HCIFZ K9. LK8 M0S M1P M2P M7P PHGZM PHGZT PIMPY PJZUB PKEHL PPXIY PQEST PQGLB PQQKQ PQUKI PRINS Q9U 7X8 5PM |
| DOI | 10.1038/s41598-020-61285-8 |
| DatabaseName | Springer Nature OA Free Journals CrossRef PubMed ProQuest Central (Corporate) ProQuest Health & Medical Collection ProQuest Central (purchase pre-March 2016) Biology Database (Alumni Edition) Medical Database (Alumni Edition) Science Database (Alumni Edition) ProQuest SciTech Collection ProQuest Natural Science Journals ProQuest Hospital Collection Hospital Premium Collection (Alumni Edition) ProQuest Central (Alumni) (purchase pre-March 2016) ProQuest Central (Alumni) ProQuest One Sustainability ProQuest Central UK/Ireland ProQuest Central Essentials Biological Science Collection ProQuest Central Natural Science Collection ProQuest One Community College ProQuest Central Korea Health Research Premium Collection Health Research Premium Collection (Alumni) ProQuest Central Student SciTech Premium Collection ProQuest Health & Medical Complete (Alumni) Biological Sciences ProQuest Health & Medical Collection Proquest Medical Database Science Database (via ProQuest SciTech Premium Collection) Biological Science Database ProQuest Central Premium ProQuest One Academic Publicly Available Content Database ProQuest Health & Medical Research Collection ProQuest One Academic Middle East (New) ProQuest One Health & Nursing ProQuest One Academic Eastern Edition (DO NOT USE) ProQuest One Applied & Life Sciences ProQuest One Academic ProQuest One Academic UKI Edition ProQuest Central China ProQuest Central Basic MEDLINE - Academic PubMed Central (Full Participant titles) |
| DatabaseTitle | CrossRef PubMed Publicly Available Content Database ProQuest Central Student ProQuest One Academic Middle East (New) ProQuest Central Essentials ProQuest Health & Medical Complete (Alumni) ProQuest Central (Alumni Edition) SciTech Premium Collection ProQuest One Community College ProQuest One Health & Nursing ProQuest Natural Science Collection ProQuest Central China ProQuest Biology Journals (Alumni Edition) ProQuest Central ProQuest One Applied & Life Sciences ProQuest One Sustainability ProQuest Health & Medical Research Collection Health Research Premium Collection Health and Medicine Complete (Alumni Edition) Natural Science Collection ProQuest Central Korea Health & Medical Research Collection Biological Science Collection ProQuest Central (New) ProQuest Medical Library (Alumni) ProQuest Science Journals (Alumni Edition) ProQuest Biological Science Collection ProQuest Central Basic ProQuest Science Journals ProQuest One Academic Eastern Edition ProQuest Hospital Collection Health Research Premium Collection (Alumni) Biological Science Database ProQuest SciTech Collection ProQuest Hospital Collection (Alumni) ProQuest Health & Medical Complete ProQuest Medical Library ProQuest One Academic UKI Edition ProQuest One Academic ProQuest One Academic (New) ProQuest Central (Alumni) MEDLINE - Academic |
| DatabaseTitleList | CrossRef Publicly Available Content Database MEDLINE - Academic PubMed |
| Database_xml | – sequence: 1 dbid: C6C name: Springer Nature OA Free Journals url: http://www.springeropen.com/ sourceTypes: Publisher – sequence: 2 dbid: NPM name: PubMed url: https://proxy.k.utb.cz/login?url=http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed sourceTypes: Index Database – sequence: 3 dbid: BENPR name: ProQuest Central url: https://www.proquest.com/central sourceTypes: Aggregation Database |
| DeliveryMethod | fulltext_linktorsrc |
| Discipline | Biology |
| EISSN | 2045-2322 |
| ExternalDocumentID | PMC7062775 32152367 10_1038_s41598_020_61285_8 |
| Genre | Journal Article |
| GroupedDBID | 0R~ 3V. 4.4 53G 5VS 7X7 88A 88E 88I 8FE 8FH 8FI 8FJ AAFWJ AAJSJ AAKDD ABDBF ABUWG ACGFS ACSMW ACUHS ADBBV ADRAZ AENEX AEUYN AFKRA AJTQC ALIPV ALMA_UNASSIGNED_HOLDINGS AOIJS AZQEC BAWUL BBNVY BCNDV BENPR BHPHI BPHCQ BVXVI C6C CCPQU DIK DWQXO EBD EBLON EBS ESX FYUFA GNUQQ GROUPED_DOAJ GX1 HCIFZ HH5 HMCUK HYE KQ8 LK8 M0L M1P M2P M48 M7P M~E NAO OK1 PIMPY PQQKQ PROAC PSQYO RNT RNTTT RPM SNYQT UKHRP AASML AAYXX AFPKN CITATION PHGZM PHGZT NPM 7XB 8FK AARCD K9. PJZUB PKEHL PPXIY PQEST PQGLB PQUKI PRINS Q9U 7X8 5PM |
| ID | FETCH-LOGICAL-c540t-6673474d6504fea991c652dab8e349d2a2cdc6911fd3663a3ac0c7708dcd045f3 |
| IEDL.DBID | 7X7 |
| ISSN | 2045-2322 |
| IngestDate | Thu Aug 21 17:45:58 EDT 2025 Thu Jul 10 23:40:10 EDT 2025 Wed Aug 13 08:09:59 EDT 2025 Thu Apr 03 06:59:46 EDT 2025 Tue Jul 01 03:24:05 EDT 2025 Thu Apr 24 23:12:54 EDT 2025 Fri Feb 21 02:38:43 EST 2025 |
| IsDoiOpenAccess | true |
| IsOpenAccess | true |
| IsPeerReviewed | true |
| IsScholarly | true |
| Issue | 1 |
| Language | English |
| License | Open Access This article is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons license, and indicate if changes were made. The images or other third party material in this article are included in the article’s Creative Commons license, unless indicated otherwise in a credit line to the material. If material is not included in the article’s Creative Commons license and your intended use is not permitted by statutory regulation or exceeds the permitted use, you will need to obtain permission directly from the copyright holder. To view a copy of this license, visit http://creativecommons.org/licenses/by/4.0/. |
| LinkModel | DirectLink |
| MergedId | FETCHMERGED-LOGICAL-c540t-6673474d6504fea991c652dab8e349d2a2cdc6911fd3663a3ac0c7708dcd045f3 |
| Notes | ObjectType-Article-1 SourceType-Scholarly Journals-1 ObjectType-Feature-2 content type line 14 content type line 23 |
| OpenAccessLink | https://www.proquest.com/docview/2375479902?pq-origsite=%requestingapplication% |
| PMID | 32152367 |
| PQID | 2375479902 |
| PQPubID | 2041939 |
| ParticipantIDs | pubmedcentral_primary_oai_pubmedcentral_nih_gov_7062775 proquest_miscellaneous_2375895303 proquest_journals_2375479902 pubmed_primary_32152367 crossref_citationtrail_10_1038_s41598_020_61285_8 crossref_primary_10_1038_s41598_020_61285_8 springer_journals_10_1038_s41598_020_61285_8 |
| ProviderPackageCode | CITATION AAYXX |
| PublicationCentury | 2000 |
| PublicationDate | 2020-03-09 |
| PublicationDateYYYYMMDD | 2020-03-09 |
| PublicationDate_xml | – month: 03 year: 2020 text: 2020-03-09 day: 09 |
| PublicationDecade | 2020 |
| PublicationPlace | London |
| PublicationPlace_xml | – name: London – name: England |
| PublicationTitle | Scientific reports |
| PublicationTitleAbbrev | Sci Rep |
| PublicationTitleAlternate | Sci Rep |
| PublicationYear | 2020 |
| Publisher | Nature Publishing Group UK Nature Publishing Group |
| Publisher_xml | – name: Nature Publishing Group UK – name: Nature Publishing Group |
| References | Park (CR8) 2008; 26 Youngman, Harris (CR38) 1990; 73 Balaji (CR32) 2012; 526 Lughi, Clarke (CR33) 2006; 89 Kim (CR23) 2019; 4 Akiyama (CR5) 2009; 21 CR14 Meng, Liu, Fu, Wang, Hao (CR27) 2015; 347 Li, Zhou, Jiang, You (CR31) 2006; 57 Kim, Kim, An, Yoon, Choi (CR26) 2019; 159 Guo, Smalley, Scuseria (CR21) 1993; 99 Yang, Chai, Wang, Wang, Feng (CR24) 2012; 116 Chowdhury, Ng, Bhardwaj, Weimann (CR7) 2003; 83 Wei (CR28) 2014; 24 Harris, Youngman, Teller (CR37) 2011; 5 Jasinski, Liliental-Weber, Paduano, Weyburne (CR11) 2003; 83 Ghosh, Hatwar (CR22) 1988; 166 Milyutin (CR15) 2010; 28 Sun, Xiong, Zhang, Liu, Gu (CR41) 2015; 621 Kamohara (CR16) 2006; 89 Akiyama, Kamohara, Kano, Teshigahara, Kawahara (CR17) 2008; 93 Anggraini, Uehara, Yamada, Akiyama (CR18) 2019; 159 Yoshiki, Tsuyoshi, Tokihiro, Masanori (CR3) 2015; 8 CR6 Hite, Twigg, Mastro, Eddy, Kub (CR9) 2011; 208 Yu (CR20) 2011; 354 Klemens (CR36) 2002; 316-317 Romano, Northrup, Ptak, Myers (CR10) 2000; 77 Lee, Kim (CR34) 2010; 93 Wong, Wu, Speck, Mishra (CR13) 2010; 108 Bergman (CR35) 1999; 59 Uehara (CR4) 2017; 111 Bernard (CR30) 2000; 380 Lebedev (CR19) 2005; 97 Hevia, Stampfl, Viñes, Illas (CR29) 2013; 88 Suzuki, Yanagitani, Odagawa (CR2) 2014; 104 Schmidt (CR25) 2016; 8 Anggraini, Uehara, Yamada, Akiyama (CR39) 2018; 219 Kim (CR40) 2016; 8 Akiyama (CR12) 2007; 90 Ji (CR42) 2007; 18 Wu (CR1) 2004; 84 D Kim (61285_CR23) 2019; 4 L Bergman (61285_CR35) 1999; 59 MH Wong (61285_CR13) 2010; 108 V Lebedev (61285_CR19) 2005; 97 S Schmidt (61285_CR25) 2016; 8 A Chowdhury (61285_CR7) 2003; 83 T Kamohara (61285_CR16) 2006; 89 T Guo (61285_CR21) 1993; 99 PG Klemens (61285_CR36) 2002; 316-317 M Suzuki (61285_CR2) 2014; 104 J Jasinski (61285_CR11) 2003; 83 V Lughi (61285_CR33) 2006; 89 M Akiyama (61285_CR12) 2007; 90 J-P Meng (61285_CR27) 2015; 347 M Balaji (61285_CR32) 2012; 526 M Uehara (61285_CR4) 2017; 111 M Akiyama (61285_CR5) 2009; 21 X Li (61285_CR31) 2006; 57 SA Anggraini (61285_CR39) 2018; 219 M Akiyama (61285_CR17) 2008; 93 61285_CR6 JS Park (61285_CR8) 2008; 26 I Yoshiki (61285_CR3) 2015; 8 Y Wu (61285_CR1) 2004; 84 SA Anggraini (61285_CR18) 2019; 159 E Milyutin (61285_CR15) 2010; 28 H Kim (61285_CR26) 2019; 159 LT Romano (61285_CR10) 2000; 77 61285_CR14 Q-P Wei (61285_CR28) 2014; 24 Q Yu (61285_CR20) 2011; 354 XH Ji (61285_CR42) 2007; 18 SK Ghosh (61285_CR22) 1988; 166 Y Kim (61285_CR40) 2016; 8 DF Hevia (61285_CR29) 2013; 88 M Bernard (61285_CR30) 2000; 380 H-K Lee (61285_CR34) 2010; 93 RA Youngman (61285_CR38) 1990; 73 JH Harris (61285_CR37) 2011; 5 X Sun (61285_CR41) 2015; 621 M Yang (61285_CR24) 2012; 116 JK Hite (61285_CR9) 2011; 208 |
| References_xml | – volume: 316-317 start-page: 413 year: 2002 end-page: 416 ident: CR36 article-title: Effect of point defects on the decay of the longitudinal optical mode publication-title: Physica B: Condensed Matter doi: 10.1016/S0921-4526(02)00530-6 – volume: 59 start-page: 12977 year: 1999 end-page: 12982 ident: CR35 article-title: Raman analysis of phonon lifetimes in AlN and GaN of wurtzite structure publication-title: Physical Review B doi: 10.1103/PhysRevB.59.12977 – volume: 97 start-page: 114306 year: 2005 ident: CR19 article-title: Effect of nanoscale surface morphology on the phase stability of 3C-AlN films on Si(111) publication-title: Journal of Applied Physics doi: 10.1063/1.1915535 – volume: 24 start-page: 2845 year: 2014 end-page: 2855 ident: CR28 article-title: Effects of sputtering pressure on nanostructure and nanomechanical properties of AlN films prepared by RF reactive sputtering publication-title: Transactions of Nonferrous Metals Society of China doi: 10.1016/S1003-6326(14)63417-8 – ident: CR14 – volume: 108 start-page: 123710 year: 2010 ident: CR13 article-title: Polarity inversion of N-face GaN using an aluminum oxide interlayer publication-title: Journal of Applied Physics doi: 10.1063/1.3524473 – volume: 28 start-page: L61 year: 2010 end-page: L63 ident: CR15 article-title: Sputtering of (001)AlN thin films: Control of polarity by a seed layer publication-title: Journal of Vacuum Science & Technology B doi: 10.1116/1.3501117 – volume: 8 start-page: 061501 year: 2015 ident: CR3 article-title: Highly enhanced piezoelectric property of co-doped AlN publication-title: Applied Physics Express doi: 10.7567/APEX.8.061501 – ident: CR6 – volume: 104 start-page: 172905 year: 2014 ident: CR2 article-title: Polarity-inverted ScAlN film growth by ion beam irradiation and application to overtone acoustic wave (000-1)/(0001) film resonators publication-title: Applied Physics Letters doi: 10.1063/1.4874840 – volume: 8 start-page: 20385 year: 2016 end-page: 20395 ident: CR25 article-title: SiNx Coatings Deposited by Reactive High Power Impulse Magnetron Sputtering: Process Parameters Influencing the Nitrogen Content publication-title: ACS Applied Materials & Interfaces doi: 10.1021/acsami.6b05830 – volume: 354 start-page: 341 year: 2011 end-page: 352 ident: CR20 article-title: Textural, structural, and morphological characterizations and catalytic activity of nanosized CeO2–MOx (M=Mg2+, Al3+, Si4+) mixed oxides for CO oxidation publication-title: Journal of Colloid and Interface Science doi: 10.1016/j.jcis.2010.10.043 – volume: 4 start-page: 8431 year: 2019 end-page: 8440 ident: CR23 article-title: Highly Luminous N3–-Substituted Li2MSiO4−δN2/3δ:Eu2+ (M = Ca, Sr, and Ba) for White NUV Light-Emitting Diodes publication-title: ACS Omega doi: 10.1021/acsomega.8b03489 – volume: 83 start-page: 1077 year: 2003 end-page: 1079 ident: CR7 article-title: Second-harmonic generation in periodically poled GaN publication-title: Applied Physics Letters doi: 10.1063/1.1599044 – volume: 621 start-page: 314 year: 2015 end-page: 318 ident: CR41 article-title: Investigation of blue luminescence in Mg doped AlN films publication-title: Journal of Alloys and Compounds doi: 10.1016/j.jallcom.2014.10.018 – volume: 18 start-page: 105601 year: 2007 ident: CR42 article-title: Ferromagnetic Cu-doped AlN nanorods publication-title: Nanotechnology doi: 10.1088/0957-4484/18/10/105601 – volume: 90 start-page: 151910 year: 2007 ident: CR12 article-title: Polarity inversion in aluminum nitride thin films under high sputtering power publication-title: Applied Physics Letters doi: 10.1063/1.2721865 – volume: 88 start-page: 085202 year: 2013 ident: CR29 article-title: Microscopic origin of $n$-type behavior in Si-doped AlN publication-title: Physical Review B doi: 10.1103/PhysRevB.88.085202 – volume: 57 start-page: 105 year: 2006 end-page: 110 ident: CR31 article-title: Raman analysis of aluminum nitride at high temperature publication-title: Materials Characterization doi: 10.1016/j.matchar.2005.12.012 – volume: 93 start-page: 021903 year: 2008 ident: CR17 article-title: Influence of oxygen concentration in sputtering gas on piezoelectric response of aluminum nitride thin films publication-title: Applied Physics Letters doi: 10.1063/1.2957654 – volume: 93 start-page: 2167 year: 2010 end-page: 2170 ident: CR34 article-title: Investigation on Thermal Conductivity of Aluminum Nitride Ceramics by FT-Raman Spectroscopy publication-title: Journal of the American Ceramic Society doi: 10.1111/j.1551-2916.2010.03704.x – volume: 380 start-page: 252 year: 2000 end-page: 255 ident: CR30 article-title: Raman spectra of TiN/AlN superlattices publication-title: Thin Solid Films doi: 10.1016/S0040-6090(00)01531-5 – volume: 83 start-page: 2811 year: 2003 end-page: 2813 ident: CR11 article-title: Inversion domains in AlN grown on (0001) sapphire publication-title: Applied Physics Letters doi: 10.1063/1.1616191 – volume: 89 start-page: 241911 year: 2006 ident: CR33 article-title: Defect and stress characterization of AlN films by Raman spectroscopy publication-title: Applied Physics Letters doi: 10.1063/1.2404938 – volume: 208 start-page: 1504 year: 2011 end-page: 1506 ident: CR9 article-title: Initiating polarity inversion in GaN growth using an AlN interlayer publication-title: physica status solidi (a) doi: 10.1002/pssa.201001123 – volume: 111 start-page: 112901 year: 2017 ident: CR4 article-title: Giant increase in piezoelectric coefficient of AlN by Mg-Nb simultaneous addition and multiple chemical states of Nb publication-title: Applied Physics Letters doi: 10.1063/1.4990533 – volume: 89 start-page: 243507 year: 2006 ident: CR16 article-title: Influence of sputtering pressure on polarity distribution of aluminum nitride thin films publication-title: Applied Physics Letters doi: 10.1063/1.2405849 – volume: 526 start-page: 103 year: 2012 end-page: 109 ident: CR32 article-title: Effects of AlN nucleation layers on the growth of AlN films using high temperature hydride vapor phase epitaxy publication-title: Journal of Alloys and Compounds doi: 10.1016/j.jallcom.2012.02.111 – volume: 159 start-page: 379 year: 2019 end-page: 381 ident: CR26 article-title: Improved interfacial properties of thermal atomic layer deposited AlN on GaN publication-title: Vacuum doi: 10.1016/j.vacuum.2018.10.067 – volume: 26 start-page: 90 year: 2008 end-page: 96 ident: CR8 article-title: Effects of interfacial layer structures on crystal structural properties of ZnO films publication-title: Journal of Vacuum Science & Technology A doi: 10.1116/1.2821741 – volume: 99 start-page: 352 year: 1993 end-page: 359 ident: CR21 article-title: Ab initio theoretical predictions of C28, C28H4, C28F4, (Ti@C28)H4, and M@C28 (M=Mg, Al, Si, S, Ca, Sc, Ti, Ge, Zr, and Sn) publication-title: The Journal of Chemical Physics doi: 10.1063/1.465758 – volume: 219 start-page: 247 year: 2018 end-page: 250 ident: CR39 article-title: Effect of Mg addition on the physical properties of aluminum nitride publication-title: Materials Letters doi: 10.1016/j.matlet.2018.02.091 – volume: 73 start-page: 3238 year: 1990 end-page: 3246 ident: CR38 article-title: Luminescence Studies of Oxygen-Related Defects In Aluminum Nitride publication-title: Journal of the American Ceramic Society doi: 10.1111/j.1151-2916.1990.tb06444.x – volume: 347 start-page: 109 year: 2015 end-page: 115 ident: CR27 article-title: Thermal stability of AlN films prepared by ion beam assisted deposition publication-title: Applied Surface Science doi: 10.1016/j.apsusc.2015.03.120 – volume: 159 start-page: 9 year: 2019 end-page: 12 ident: CR18 article-title: Mg and Ti codoping effect on the piezoelectric response of aluminum nitride thin films publication-title: Scripta Materialia doi: 10.1016/j.scriptamat.2018.09.001 – volume: 166 start-page: 359 year: 1988 end-page: 366 ident: CR22 article-title: Preparation and characterization of reactively sputtered silicon nitride thin films publication-title: Thin Solid Films doi: 10.1016/0040-6090(88)90398-7 – volume: 77 start-page: 2479 year: 2000 end-page: 2481 ident: CR10 article-title: Faceted inversion domain boundary in GaN films doped with Mg publication-title: Applied Physics Letters doi: 10.1063/1.1318731 – volume: 84 start-page: 912 year: 2004 end-page: 914 ident: CR1 article-title: Effect of nitridation on polarity, microstructure, and morphology of AlN films publication-title: Applied Physics Letters doi: 10.1063/1.1646222 – volume: 116 start-page: 22315 year: 2012 end-page: 22318 ident: CR24 article-title: Interfacial Properties of Silicon Nitride Grown on Epitaxial Graphene on 6H-SiC Substrate publication-title: The Journal of Physical Chemistry C doi: 10.1021/jp304054u – volume: 5 start-page: 1763 year: 2011 end-page: 1773 ident: CR37 article-title: On the nature of the oxygen-related defect in aluminum nitride publication-title: Journal of Materials Research doi: 10.1557/JMR.1990.1763 – volume: 21 start-page: 593 year: 2009 end-page: 596 ident: CR5 article-title: Enhancement of Piezoelectric Response in Scandium Aluminum Nitride Alloy Thin Films Prepared by Dual Reactive Cosputtering publication-title: Advanced Materials doi: 10.1002/adma.200802611 – volume: 8 start-page: 17599 year: 2016 end-page: 17605 ident: CR40 article-title: Plasma-Enhanced Atomic Layer Deposition of SiN–AlN Composites for Ultra Low Wet Etch Rates in Hydrofluoric Acid publication-title: ACS Applied Materials & Interfaces doi: 10.1021/acsami.6b03194 – volume: 8 start-page: 061501 year: 2015 ident: 61285_CR3 publication-title: Applied Physics Express doi: 10.7567/APEX.8.061501 – volume: 21 start-page: 593 year: 2009 ident: 61285_CR5 publication-title: Advanced Materials doi: 10.1002/adma.200802611 – volume: 93 start-page: 021903 year: 2008 ident: 61285_CR17 publication-title: Applied Physics Letters doi: 10.1063/1.2957654 – volume: 5 start-page: 1763 year: 2011 ident: 61285_CR37 publication-title: Journal of Materials Research doi: 10.1557/JMR.1990.1763 – volume: 89 start-page: 243507 year: 2006 ident: 61285_CR16 publication-title: Applied Physics Letters doi: 10.1063/1.2405849 – volume: 57 start-page: 105 year: 2006 ident: 61285_CR31 publication-title: Materials Characterization doi: 10.1016/j.matchar.2005.12.012 – volume: 59 start-page: 12977 year: 1999 ident: 61285_CR35 publication-title: Physical Review B doi: 10.1103/PhysRevB.59.12977 – volume: 166 start-page: 359 year: 1988 ident: 61285_CR22 publication-title: Thin Solid Films doi: 10.1016/0040-6090(88)90398-7 – volume: 219 start-page: 247 year: 2018 ident: 61285_CR39 publication-title: Materials Letters doi: 10.1016/j.matlet.2018.02.091 – volume: 4 start-page: 8431 year: 2019 ident: 61285_CR23 publication-title: ACS Omega doi: 10.1021/acsomega.8b03489 – volume: 111 start-page: 112901 year: 2017 ident: 61285_CR4 publication-title: Applied Physics Letters doi: 10.1063/1.4990533 – volume: 159 start-page: 9 year: 2019 ident: 61285_CR18 publication-title: Scripta Materialia doi: 10.1016/j.scriptamat.2018.09.001 – volume: 526 start-page: 103 year: 2012 ident: 61285_CR32 publication-title: Journal of Alloys and Compounds doi: 10.1016/j.jallcom.2012.02.111 – volume: 380 start-page: 252 year: 2000 ident: 61285_CR30 publication-title: Thin Solid Films doi: 10.1016/S0040-6090(00)01531-5 – volume: 347 start-page: 109 year: 2015 ident: 61285_CR27 publication-title: Applied Surface Science doi: 10.1016/j.apsusc.2015.03.120 – volume: 26 start-page: 90 year: 2008 ident: 61285_CR8 publication-title: Journal of Vacuum Science & Technology A doi: 10.1116/1.2821741 – volume: 93 start-page: 2167 year: 2010 ident: 61285_CR34 publication-title: Journal of the American Ceramic Society doi: 10.1111/j.1551-2916.2010.03704.x – volume: 73 start-page: 3238 year: 1990 ident: 61285_CR38 publication-title: Journal of the American Ceramic Society doi: 10.1111/j.1151-2916.1990.tb06444.x – volume: 208 start-page: 1504 year: 2011 ident: 61285_CR9 publication-title: physica status solidi (a) doi: 10.1002/pssa.201001123 – volume: 24 start-page: 2845 year: 2014 ident: 61285_CR28 publication-title: Transactions of Nonferrous Metals Society of China doi: 10.1016/S1003-6326(14)63417-8 – volume: 99 start-page: 352 year: 1993 ident: 61285_CR21 publication-title: The Journal of Chemical Physics doi: 10.1063/1.465758 – volume: 159 start-page: 379 year: 2019 ident: 61285_CR26 publication-title: Vacuum doi: 10.1016/j.vacuum.2018.10.067 – volume: 97 start-page: 114306 year: 2005 ident: 61285_CR19 publication-title: Journal of Applied Physics doi: 10.1063/1.1915535 – volume: 316-317 start-page: 413 year: 2002 ident: 61285_CR36 publication-title: Physica B: Condensed Matter doi: 10.1016/S0921-4526(02)00530-6 – volume: 83 start-page: 2811 year: 2003 ident: 61285_CR11 publication-title: Applied Physics Letters doi: 10.1063/1.1616191 – volume: 89 start-page: 241911 year: 2006 ident: 61285_CR33 publication-title: Applied Physics Letters doi: 10.1063/1.2404938 – volume: 83 start-page: 1077 year: 2003 ident: 61285_CR7 publication-title: Applied Physics Letters doi: 10.1063/1.1599044 – volume: 90 start-page: 151910 year: 2007 ident: 61285_CR12 publication-title: Applied Physics Letters doi: 10.1063/1.2721865 – volume: 354 start-page: 341 year: 2011 ident: 61285_CR20 publication-title: Journal of Colloid and Interface Science doi: 10.1016/j.jcis.2010.10.043 – ident: 61285_CR6 – volume: 116 start-page: 22315 year: 2012 ident: 61285_CR24 publication-title: The Journal of Physical Chemistry C doi: 10.1021/jp304054u – volume: 621 start-page: 314 year: 2015 ident: 61285_CR41 publication-title: Journal of Alloys and Compounds doi: 10.1016/j.jallcom.2014.10.018 – volume: 8 start-page: 20385 year: 2016 ident: 61285_CR25 publication-title: ACS Applied Materials & Interfaces doi: 10.1021/acsami.6b05830 – volume: 84 start-page: 912 year: 2004 ident: 61285_CR1 publication-title: Applied Physics Letters doi: 10.1063/1.1646222 – volume: 77 start-page: 2479 year: 2000 ident: 61285_CR10 publication-title: Applied Physics Letters doi: 10.1063/1.1318731 – volume: 18 start-page: 105601 year: 2007 ident: 61285_CR42 publication-title: Nanotechnology doi: 10.1088/0957-4484/18/10/105601 – volume: 28 start-page: L61 year: 2010 ident: 61285_CR15 publication-title: Journal of Vacuum Science & Technology B doi: 10.1116/1.3501117 – volume: 88 start-page: 085202 year: 2013 ident: 61285_CR29 publication-title: Physical Review B doi: 10.1103/PhysRevB.88.085202 – ident: 61285_CR14 doi: 10.1002/1521-3951(200111)228:2<505::AID-PSSB505>3.0.CO;2-U – volume: 104 start-page: 172905 year: 2014 ident: 61285_CR2 publication-title: Applied Physics Letters doi: 10.1063/1.4874840 – volume: 108 start-page: 123710 year: 2010 ident: 61285_CR13 publication-title: Journal of Applied Physics doi: 10.1063/1.3524473 – volume: 8 start-page: 17599 year: 2016 ident: 61285_CR40 publication-title: ACS Applied Materials & Interfaces doi: 10.1021/acsami.6b03194 |
| SSID | ssj0000529419 |
| Score | 2.4536035 |
| Snippet | Polarity is among the critical characteristics that could governs the functionality of piezoelectric materials. In this study, the polarity of aluminum nitride... |
| SourceID | pubmedcentral proquest pubmed crossref springer |
| SourceType | Open Access Repository Aggregation Database Index Database Enrichment Source Publisher |
| StartPage | 4369 |
| SubjectTerms | 639/301 639/638 Aluminum Crystal structure Humanities and Social Sciences multidisciplinary Oxidation Point defects Polarity Science Science (multidisciplinary) Thin films |
| SummonAdditionalLinks | – databaseName: Scholars Portal Journals: Open Access dbid: M48 link: http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwfV1bS-QwFD54YcGXxdXVrZclgm9utU3Spn1YFtl1EGEGQQd8K2nSuoWxs850wPn3ntPLyKyXt0IS2pxz0vPl9n0AxzZV0qaxcZWfeq40xAHpGe7aWGZSKs_Yek23Pwgvh_LqLrhbgU7uqDXg9M2pHelJDSej06fH-S8c8D-bK-PR2RSTEF0UqydCPArcaBXWMTMpGqj9Fu43XN88ln7c3p15u-lyfnoFOl-fnfxvA7XOS71N-NwCSnbeRMAXWMnKLfjUSEzOt2FwTR1EqM2IUaNeG2PjnJ3jP6koZw9sUFSTwmaM9DtZrxg9TFk6Z3Qa_p7dFEyXlvXv8eEPTq7LavoVhr2L29-Xbquh4BrEYpVLqp4S3YFATOaZRjRowoBbnUaZkLHlmhtrQvzj5VYg-NBCG88o5UUWvSSDXOzAWjkus2_ApMiFHxJlWSqlzYPU97VBdGh94-daSwf8znKJaQnGSedilNQb3SJKGmsnaO2ktnYSOXCyaPOvodf4sPZB55Cki5SEk4ivwqTKHThaFOMgoZ0PXWbjWVMnigNM1w7sNv5bvE6Qsq8IlQNqybOLCkTAvVxSFn9rIm5FHM8qcOBHFwMvn_V-L_Y-7sU-bHCKRzrnFh_AWjWZZYcIfKr0ex3NzyTX_MA priority: 102 providerName: Scholars Portal – databaseName: Springer Nature OA Free Journals dbid: C6C link: http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwlV3dS-QwEB885eBexK876xcRfNNybZI27aOsLiK4CCr4VtKk9QraFbf74H_vTPohq3cHvhWS0HZmkvklM_kNwJHNlbR5anwV5oEvDXFABob7NpWFlCow1p3pXk3iizt5eR_dLwHv78K4pH1HaemW6T477PcMHQ1dBnObHZ5EfvINVoi6nax6FI-GcxWKXMkw7e7HBCL5y9BFH_QJWH7Oj_wQJHW-Z7wGqx1oZKftZ67DUlFvwPe2jOTrJkyuaX-KcJoRa4Y7_2LTkp3iulPV8yc2qZqXyhaManSycfX4NGP5K6OM9wd2UzFdW3b1gA9nuIGum9kW3I3Pb0cXflcnwTeItxqfKndKFDmCLVkWGhGfiSNudZ4UQqaWa26siXFVK61AgKGFNoFRKkgsakJGpfgJy_W0LraBSVGKMCZaslxKW0Z5GGqDCNCGJiy1lh6EveQy05GIUy2Lx8wFs0WStdLOUNqZk3aWeHA8jHluKTT-23uvV0jWTadZxqlQr0LHyT04HJpxIlB0Q9fFdN72SdIIXbIHv1r9Da8TVL1XxMoDtaDZoQORbC-21NUfR7atiMdZRR6c9Dbw_ln__oudr3XfhR-c7JNy29I9WG5e5sU-gp0mP3DW_QYKyfdf priority: 102 providerName: Springer Nature |
| Title | Polarity Inversion of Aluminum Nitride Thin Films by using Si and MgSi Dopants |
| URI | https://link.springer.com/article/10.1038/s41598-020-61285-8 https://www.ncbi.nlm.nih.gov/pubmed/32152367 https://www.proquest.com/docview/2375479902 https://www.proquest.com/docview/2375895303 https://pubmed.ncbi.nlm.nih.gov/PMC7062775 |
| Volume | 10 |
| hasFullText | 1 |
| inHoldings | 1 |
| isFullTextHit | |
| isPrint | |
| link | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwfV3fa9swED62lsFeyn7PXRc02NtmaluyJT-NLG0ogYSyrpA3I0t2Z2idtnYe-t_3TnZc0rK-JCFWcHwnnz7dnb8P4LvNpbB5anwZ5oEvDHFABibybSoKIWRgrMvpzhfJybmYLeNln3Br-rbKTUx0gdquDOXIDyPSapUYO6Nf1zc-qUZRdbWX0HgJu0RdRi1dcimHHAtVsUSY9s_KBFwdNrhe0TNlbs8UqdhX2-vRE5D5tFfyUcHUrUPTN7DXA0g27jz-Fl4U9Tt41UlK3r2HxSntVRFaM2LQcLkwtirZGGNQVa-v2KJqbytbMNLrZNPq8qph-R2j7vcLdlYxXVs2v8APR7iZrtvmA5xPj_9OTvxeM8E3iL1an1Q8BZofgZcoC43ozyRxZHWuCi5SG-nIWJNghCstR7ChuTaBkTJQFr0i4pJ_hJ16VRefgQle8jAhirJcCFvGeRhqg2jQhiYstRYehBvLZaYnFCddi8vMFba5yjprZ2jtzFk7Ux78GH5z3dFpPDv6YOOQrL-1muxhInjwbTiMNwVVOnRdrNbdGJXGuDx78Knz33A6Tkq-PJEeyC3PDgOIcHv7SF39c8TbkjidZezBz80cePhb_7-K_eev4gu8jmg-Ul9begA77e26-IpAp81HbjaPYHc8np3N8P338eL0D347SSYjlzzA17lQ9wMv_2c |
| linkProvider | ProQuest |
| linkToHtml | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwtV1Lb9QwEB6VrRBcEG8CBYwEJ4ia2E6cHBAqtKst7UYVtFJvwbGTEqnNlm5WaP8Uv5GZvKqlorfeItlJ7PF4_I3Hng_grc2UtFlsXOVnnisN5YD0DHdtLHMplWdss6c7TcLJkfx6HByvwZ_-Lgwdq-xtYmOo7czQHvkmJ65WhbaTfzr_5RJrFEVXewqNVi328uVvdNnmH3e3cXzfcT7eOfwycTtWAdcgOqld4rmU2ECEJrLINeIjEwbc6izKhYwt19xYE6INKKzA5VgLbTyjlBdZbLcMCoHfvQXrUqArM4L1zzvJwbdhV4fiZtKPu9s5nog257hC0i22xkvjUeBGqyvgFVh79XTmPyHaZuUb34d7HWRlW62OPYC1vHoIt1sSy-UjSA7IO0YwzyhnR7P7xmYF20KrV1aLM5aU9UVpc0YMoWxcnp7NWbZkdN7-hH0vma4sm57gwza671U9fwxHNyLPJzCqZlX-DJgUhfBDSoqWSWmLIPN9bRB_Wt_4hdbSAb-XXGq6FObEpHGaNqF0EaWttFOUdtpIO40ceD-8c94m8Li29kY_IGk3mefppeo58GYoxmlIsRVd5bNFWyeKAwQEDjxtx2_4nSDuYBEqB9TKyA4VKMX3aklV_mxSfSvKIq0CBz70OnDZrP_34vn1vXgNdyaH0_10fzfZewF3OekmnaqLN2BUXyzylwiz6uxVp9sMftz0dPoLCb83pQ |
| linkToPdf | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwtV1Lb9QwEB6VIhAXVN5pCxgJThBtYjtxckBVxbJqKV1Vgkp7C46dlEhttm2yQvvX-uuYyataKnrrLVKch8cz48-e8XwA722qpE1j4yo_9VxpqAakZ7hrY5lJqTxjmz3dw2m4dyy_zYLZGlz1Z2EorbL3iY2jtnNDe-QjTlytCn0nH-VdWsTReLJzfuESgxRFWns6jVZFDrLlH1y-VZ_3xzjWHziffP35Zc_tGAZcg0ildonzUuLPIkyReaYRK5kw4FanUSZkbLnmxpoQ_UFuBU7NWmjjGaW8yGIfZJALfO89uK9E4JONqZka9ncogib9uDun44loVOFcSefZmvUajwI3Wp0LbwDcm3ma_wRrmzlwsgGPO_DKdlttewJrWfkUHrR0lstnMD2idTLCekbVO5p9ODbP2S76v6JcnLFpUV8WNmPEFcomxelZxdIlo8z7E_ajYLq07PAEL8a4kC_r6jkc34k0X8B6OS-zV8CkyIUfUnm0VEqbB6nva4NI1PrGz7WWDvi95BLTFTMnTo3TpAmqiyhppZ2gtJNG2knkwMfhmfO2lMetrbf7AUk6s66SayV04N1wGw2Soiy6zOaLtk0UBwgNHHjZjt_wOUEswiJUDqiVkR0aULHv1Ttl8bsp-q2onrQKHPjU68D1b_2_F5u39-ItPEQjSr7vTw-24BEn1aT0ungb1uvLRfYa8VadvmkUm8Gvu7akv0D4OnU |
| openUrl | ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&rft.genre=article&rft.atitle=Polarity+Inversion+of+Aluminum+Nitride+Thin+Films+by+using+Si+and+MgSi+Dopants&rft.jtitle=Scientific+reports&rft.au=Anggraini+Sri+Ayu&rft.au=Uehara+Masato&rft.au=Hirata+Kenji&rft.au=Yamada%2C+Hiroshi&rft.date=2020-03-09&rft.pub=Nature+Publishing+Group&rft.eissn=2045-2322&rft.volume=10&rft.issue=1&rft_id=info:doi/10.1038%2Fs41598-020-61285-8&rft.externalDBID=HAS_PDF_LINK |
| thumbnail_l | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/lc.gif&issn=2045-2322&client=summon |
| thumbnail_m | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/mc.gif&issn=2045-2322&client=summon |
| thumbnail_s | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/sc.gif&issn=2045-2322&client=summon |