Sensing performance of precisely ordered TiO2 nanowire gas sensors fabricated by electron-beam lithography

In this study, electron beam lithography, rather than the most popular method, chemical synthesis, is used to construct periodical TiO(2) nanowires for a gas sensor with both robust and rapid performance. The effects of temperature on the sensing response and reaction time are analyzed at various op...

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Published inSensors (Basel, Switzerland) Vol. 13; no. 1; pp. 865 - 874
Main Authors Tian, Wei-Cheng, Ho, Yu-Hsuan, Chen, Chao-Hao, Kuo, Chun-Yen
Format Journal Article
LanguageEnglish
Published Switzerland MDPI AG 11.01.2013
MDPI
Subjects
Chemical synthesis
Chromatography
electro-beam lithography
Electrodes
Ethanol
Gas detectors
gas sensors
Gases
Indoor air quality
Microelectromechanical systems
Nanowires
Semiconductors
temperature effect
Temperature effects
TiO2 nanowire
United States > US
Taiwan
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Summary:In this study, electron beam lithography, rather than the most popular method, chemical synthesis, is used to construct periodical TiO(2) nanowires for a gas sensor with both robust and rapid performance. The effects of temperature on the sensing response and reaction time are analyzed at various operation temperatures ranging from 200 to 350 °C. At the optimized temperature of 300 °C, the proposed sensor repeatedly obtained a rise/recovery time (ΔR: 0.9 R(0) to 0.1 R(0)) of 3.2/17.5 s and a corresponding sensor response (ΔR/R(0)) of 21.7% at an ethanol injection mass quantity of 0.2 μg.
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ISSN:1424-8220
1424-8220
DOI:10.3390/s130100865