Evolutionary Computing and Optimal Design of MEMS

• Published in: IEEE/ASME transactions on mechatronics Vol. 20; no. 4; pp. 1660 - 1667
• Main Authors: Di Barba, Paolo, Wiak, Slawomir
• Format: Journal Article
• Language: English
• Published: New York IEEE 01.08.2015; The Institute of Electrical and Electronics Engineers, Inc. (IEEE)
• Subjects: Comb-drive electrostatic microactuator; Computation; Design engineering; electro-thermo-elastic microactuator; Electrodes; Evolutionary; Evolutionary design method; field analysis and synthesis; finite-element method; Force; Magnetic levitation; magnetic micromirror; Mathematical analysis; Mathematical models; Microelectromechanical systems; microelectromechanical systems (MEMS); Micromechanical devices; multiobjective optimal shape design; Optimization; Sociology; Statistics; Comb-drive electrostatic microactuator; magnetic micromirror; microelectromechanical systems (MEMS); finite-element method; electro-thermo-elastic microactuator; field analysis and synthesis; multiobjective optimal shape design
• ISSN: 1083-4435; 1941-014X
• DOI: 10.1109/TMECH.2014.2343241

Fostered by the development of new technologies, microelectromechanical systems (MEMS) are massively present on board of vehicles, within information equipment as well as in medical and healthcare equipment. A smart approach to the design of MEMS devices is in terms of the simultaneous optimization of multiple objective functions subject to a set of constraints. This leads to the family of solutions minimizing the degree of conflict among the objectives (Pareto front). Accordingly, in this paper, a procedure of optimal shape design of MEMS based on evolutionary computing is proposed and validated on three case studies.