Fundamental Study for a Graphite-Based Microelectromechanical System

We aimed to develop a process for constructing a carbon-based microelectromechanical system (MEMS). First, we prepared a highly oriented pyrolytic graphite (HOPG) crystal microsheet by exfoliation. We fabricated cantilevers and a double-clamped beam by controlling the thickness of the HOPG microshee...

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Published inMicromachines (Basel) Vol. 9; no. 2; p. 64
Main Authors Sone, Junji, Murakami, Mutsuaki, Tatami, Atsushi
Format Journal Article
LanguageEnglish
Published Switzerland MDPI AG 02.02.2018
MDPI
Subjects
Adhesion tests
cantilever
Cantilever beams
carbon-MEMS
Crystal structure
doubly clamped beam
Graphite
graphite sheet
HOPG
Laser beam cutting
Microelectromechanical systems
Pyrolytic graphite
Q values
resonance frequency
Thickness
cantilever
doubly clamped beam
resonance frequency
graphite sheet
carbon-MEMS
HOPG
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Abstract We aimed to develop a process for constructing a carbon-based microelectromechanical system (MEMS). First, we prepared a highly oriented pyrolytic graphite (HOPG) crystal microsheet by exfoliation. We fabricated cantilevers and a double-clamped beam by controlling the thickness of the HOPG microsheet using a MEMS process. Second, we used a graphite sheet with contour line adhesion by metal sputter deposition. Third, we used a highly accurate graphite sheet with face adhesion and laser cutting. The first resonance frequencies were evaluated. We confirmed improvement in Q values to 1/10 level of a quarts vibrator, high performance, and a simple structure.
AbstractList We aimed to develop a process for constructing a carbon-based microelectromechanical system (MEMS). First, we prepared a highly oriented pyrolytic graphite (HOPG) crystal microsheet by exfoliation. We fabricated cantilevers and a double-clamped beam by controlling the thickness of the HOPG microsheet using a MEMS process. Second, we used a graphite sheet with contour line adhesion by metal sputter deposition. Third, we used a highly accurate graphite sheet with face adhesion and laser cutting. The first resonance frequencies were evaluated. We confirmed improvement in Q values to 1/10 level of a quarts vibrator, high performance, and a simple structure.We aimed to develop a process for constructing a carbon-based microelectromechanical system (MEMS). First, we prepared a highly oriented pyrolytic graphite (HOPG) crystal microsheet by exfoliation. We fabricated cantilevers and a double-clamped beam by controlling the thickness of the HOPG microsheet using a MEMS process. Second, we used a graphite sheet with contour line adhesion by metal sputter deposition. Third, we used a highly accurate graphite sheet with face adhesion and laser cutting. The first resonance frequencies were evaluated. We confirmed improvement in Q values to 1/10 level of a quarts vibrator, high performance, and a simple structure.
We aimed to develop a process for constructing a carbon-based microelectromechanical system (MEMS). First, we prepared a highly oriented pyrolytic graphite (HOPG) crystal microsheet by exfoliation. We fabricated cantilevers and a double-clamped beam by controlling the thickness of the HOPG microsheet using a MEMS process. Second, we used a graphite sheet with contour line adhesion by metal sputter deposition. Third, we used a highly accurate graphite sheet with face adhesion and laser cutting. The first resonance frequencies were evaluated. We confirmed improvement in values to 1/10 level of a quarts vibrator, high performance, and a simple structure.
We aimed to develop a process for constructing a carbon-based microelectromechanical system (MEMS). First, we prepared a highly oriented pyrolytic graphite (HOPG) crystal microsheet by exfoliation. We fabricated cantilevers and a double-clamped beam by controlling the thickness of the HOPG microsheet using a MEMS process. Second, we used a graphite sheet with contour line adhesion by metal sputter deposition. Third, we used a highly accurate graphite sheet with face adhesion and laser cutting. The first resonance frequencies were evaluated. We confirmed improvement in Q values to 1/10 level of a quarts vibrator, high performance, and a simple structure.
We aimed to develop a process for constructing a carbon-based microelectromechanical system (MEMS). First, we prepared a highly oriented pyrolytic graphite (HOPG) crystal microsheet by exfoliation. We fabricated cantilevers and a double-clamped beam by controlling the thickness of the HOPG microsheet using a MEMS process. Second, we used a graphite sheet with contour line adhesion by metal sputter deposition. Third, we used a highly accurate graphite sheet with face adhesion and laser cutting. The first resonance frequencies were evaluated. We confirmed improvement in Q values to 1/10 level of a quarts vibrator, high performance, and a simple structure.
Author Tatami, Atsushi
Sone, Junji
Murakami, Mutsuaki
AuthorAffiliation 2 Material Solutions Research Institute, KANEKA Corporation, Torikai-Nishi 5-1-1, Settsu, Osaka 566-0072, Japan; Mutsuaki.Murakami@kaneka.co.jp (M.M.); Atsushi.Tatami@kaneka.co.jp (A.T.)
1 Faculty of Engineering, Tokyo Polytechnic University, Atsugi 243-0297, Japan
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CitedBy_id crossref_primary_10_1016_j_carbon_2018_12_057
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Cites_doi 10.1109/JMEMS.2004.839312
10.1038/nnano.2009.267
10.1063/1.124316
10.1007/978-3-211-78777-9
10.1088/0957-4484/17/20/025
10.1016/S0924-4247(98)01701-4
10.1039/B613962K
10.1016/S0924-4247(98)00218-0
10.1126/science.1136836
10.1039/C6RA14646E
10.1088/1361-6463/aa6cd6
10.1201/9781420036565
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Keywords cantilever
doubly clamped beam
resonance frequency
graphite sheet
carbon-MEMS
HOPG
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References Pimenta (ref_18) 2007; 9
ref_14
ref_13
ref_11
Rose (ref_7) 2006; 17
ref_10
ref_1
Bunch (ref_9) 2007; 315
Chen (ref_8) 2009; 4
ref_2
Wang (ref_4) 2005; 14
Dinh (ref_6) 2017; 50
ref_17
Dinh (ref_5) 2016; 6
Sone (ref_12) 2014; 8
Schueller (ref_3) 1999; A72
Toda (ref_16) 1998; A66
Lu (ref_15) 1999; 75
References_xml – volume: 14
  start-page: 348
  year: 2005
  ident: ref_4
  article-title: A Novel Method for the Fabrication of High-Aspect Ratio C-MEMS Structures
  publication-title: J. Microelectromech. Syst.
  doi: 10.1109/JMEMS.2004.839312
– volume: 4
  start-page: 861
  year: 2009
  ident: ref_8
  article-title: Performance of Monolayer Graphene Nanomechanical Resonators with Electrical Readout
  publication-title: Nat. Nanotechnol.
  doi: 10.1038/nnano.2009.267
– volume: 75
  start-page: 193
  year: 1999
  ident: ref_15
  article-title: Patterning of highly oriented pyrolytic graphite by oxygen plasma etching
  publication-title: Appl. Phys. Lett.
  doi: 10.1063/1.124316
– ident: ref_17
  doi: 10.1007/978-3-211-78777-9
– ident: ref_2
– volume: 17
  start-page: 5192
  year: 2006
  ident: ref_7
  article-title: Suspended HOPG Nanosheets for HOPG Nanoresonator Engineering and New Carbon Nanostructure Synthesis
  publication-title: Nanotechnology
  doi: 10.1088/0957-4484/17/20/025
– volume: A66
  start-page: 268
  year: 1998
  ident: ref_16
  article-title: Thin Beam Bulk Micromachining Based on RIE and Xenon Difluoride Silicon Etching
  publication-title: Sens. Actuators
  doi: 10.1016/S0924-4247(98)01701-4
– ident: ref_11
– volume: 9
  start-page: 1276
  year: 2007
  ident: ref_18
  article-title: Studying disorder in graphite-based systems by Raman spectroscopy
  publication-title: Phys. Chem. Chem. Phys.
  doi: 10.1039/B613962K
– ident: ref_13
– ident: ref_14
– volume: A72
  start-page: 125
  year: 1999
  ident: ref_3
  article-title: Fabrication of Glassy Carbon Microstructures by Soft Lithography
  publication-title: Sens. Actuators
  doi: 10.1016/S0924-4247(98)00218-0
– ident: ref_1
– volume: 8
  start-page: 1082
  year: 2014
  ident: ref_12
  article-title: Feasible Development of a Carbon-Based MEMS Using a MEMS Fabrication Process
  publication-title: J. Chem. Chem. Eng.
– volume: 315
  start-page: 490
  year: 2007
  ident: ref_9
  article-title: Electromechanical Resonators, from Graphene Sheets
  publication-title: Science
  doi: 10.1126/science.1136836
– volume: 6
  start-page: 77267
  year: 2016
  ident: ref_5
  article-title: Flexible and multifunctional electronics fabricated by a solvent-free and user-friendly method
  publication-title: RSC Adv.
  doi: 10.1039/C6RA14646E
– volume: 50
  start-page: 215401
  year: 2017
  ident: ref_6
  article-title: Solvent-free fabrication of biodegradable hot-film flow sensor for noninvasive respiratory monitoring
  publication-title: J. Phys. D Appl. Phys.
  doi: 10.1088/1361-6463/aa6cd6
– ident: ref_10
  doi: 10.1201/9781420036565
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SubjectTerms Adhesion tests
cantilever
Cantilever beams
carbon-MEMS
Crystal structure
doubly clamped beam
Graphite
graphite sheet
HOPG
Laser beam cutting
Microelectromechanical systems
Pyrolytic graphite
Q values
resonance frequency
Thickness
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Title Fundamental Study for a Graphite-Based Microelectromechanical System
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