Fundamental Study for a Graphite-Based Microelectromechanical System

We aimed to develop a process for constructing a carbon-based microelectromechanical system (MEMS). First, we prepared a highly oriented pyrolytic graphite (HOPG) crystal microsheet by exfoliation. We fabricated cantilevers and a double-clamped beam by controlling the thickness of the HOPG microshee...

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Published inMicromachines (Basel) Vol. 9; no. 2; p. 64
Main Authors Sone, Junji, Murakami, Mutsuaki, Tatami, Atsushi
Format Journal Article
LanguageEnglish
Published Switzerland MDPI AG 02.02.2018
MDPI
Subjects
Adhesion tests
cantilever
Cantilever beams
carbon-MEMS
Crystal structure
doubly clamped beam
Graphite
graphite sheet
HOPG
Laser beam cutting
Microelectromechanical systems
Pyrolytic graphite
Q values
resonance frequency
Thickness
cantilever
doubly clamped beam
resonance frequency
graphite sheet
carbon-MEMS
HOPG
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Summary:We aimed to develop a process for constructing a carbon-based microelectromechanical system (MEMS). First, we prepared a highly oriented pyrolytic graphite (HOPG) crystal microsheet by exfoliation. We fabricated cantilevers and a double-clamped beam by controlling the thickness of the HOPG microsheet using a MEMS process. Second, we used a graphite sheet with contour line adhesion by metal sputter deposition. Third, we used a highly accurate graphite sheet with face adhesion and laser cutting. The first resonance frequencies were evaluated. We confirmed improvement in Q values to 1/10 level of a quarts vibrator, high performance, and a simple structure.
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ISSN:2072-666X
2072-666X
DOI:10.3390/mi9020064