APA (7th ed.) Citation

Sone, J., Murakami, M., & Tatami, A. (2018). Fundamental Study for a Graphite-Based Microelectromechanical System. Micromachines (Basel), 9(2), 64. https://doi.org/10.3390/mi9020064

Chicago Style (17th ed.) Citation

Sone, Junji, Mutsuaki Murakami, and Atsushi Tatami. "Fundamental Study for a Graphite-Based Microelectromechanical System." Micromachines (Basel) 9, no. 2 (2018): 64. https://doi.org/10.3390/mi9020064.

MLA (9th ed.) Citation

Sone, Junji, et al. "Fundamental Study for a Graphite-Based Microelectromechanical System." Micromachines (Basel), vol. 9, no. 2, 2018, p. 64, https://doi.org/10.3390/mi9020064.