A new multifunctional platform based on high aspect ratio interdigitated NEMS structures

• Published in: Nanotechnology Vol. 20; no. 17; p. 175502
• Main Authors: Ghatnekar-Nilsson, S, Karlsson, I, Kvennefors, A, Luo, G, Zela, V, Arlelid, M, Parker, T, Montelius, L, Litwin, A
• Format: Journal Article
• Language: English
• Published: England IOP Publishing 29.04.2009
• Subjects: CANTILEVER SENSORS NANOSENSORS LITHOGRAPHY BEAM; Engineering and Technology; Nano Technology; Nanoteknik; Teknik
• ISSN: 0957-4484; 1361-6528
• DOI: 10.1088/0957-4484/20/17/175502

A multifunctional NEMS platform based on a mass-producible, surface relief grating has been developed and fabricated directly in polymer materials. The pattern consists of high aspect ratio interdigitated nanometer-sized pairs of walls and can be produced in a low-complexity one-step patterning process with nanoimprint lithography. In this paper, we demonstrate the usefulness of the platform primarily by showing an application as a high-sensitivity mass sensor in air. The sensors, which are based on the high frequency resonant response of around 200 MHz, show a mass responsivity of the order of 0.1 Hz/zg per wall at room temperature and in ambient air. Their ability to selectively adsorb airborne target molecules, such as thiols, is also demonstrated. We also show that the same device can function as a varactor for electronic circuits based on its large tunable capacitive range.