UV-LED projection photolithography for high-resolution functional photonic components

• Published in: Microsystems & nanoengineering Vol. 7; no. 1; p. 64
• Main Authors: Zheng, Lei, Zywietz, Urs, Birr, Tobias, Duderstadt, Martin, Overmeyer, Ludger, Roth, Bernhard, Reinhardt, Carsten
• Format: Journal Article
• Language: English
• Published: London Nature Publishing Group UK 17.08.2021; Springer Nature B.V; Nature Publishing Group
• Subjects: 639/624/1111; 639/624/400/1113; 639/925/927; Engineering; Forecasting; Geometric accuracy; High resolution; Materials science; Miniaturization; Optical materials; Optics; Photolithography; Photonics; Spontaneous emission; Substrates; Waveguides
• ISSN: 2055-7434; 2096-1030; 2055-7434
• DOI: 10.1038/s41378-021-00286-7

The advancement of micro- and nanostructuring techniques in optics is driven by the demand for continuous miniaturization and the high geometrical accuracy of photonic devices and integrated systems. Here, UV-LED projection photolithography is demonstrated as a simple and low-cost approach for rapid generation of two-dimensional optical micro- and nanostructures with high resolution and accuracy using standard optics only. The developed system enables the projection of structure patterns onto a substrate with 1000-fold demagnification. Photonic devices, e.g., waveguides and microring resonators, on rigid or flexible substrates with varied geometrical complexity and overall structure dimensions from the nanometer to centimeter scale were successfully prepared. In particular, high-resolution gratings with feature sizes down to 150 nm and periods as small as 400 nm were realized for the first time by this approach. Waveguides made of doped laser active materials were fabricated, and their spontaneous emission was detected. The demonstrated superior performance of the developed approach may find wide applications in photonics, plasmonics, and optical materials science, among others.