An electrochemical fabrication method for extremely thin cylindrical micropin

This paper deals with a slender micropin, which can be used for micromachining. The shaping mechanism in electrochemical etching is investigated on the basis of electrochemical kinetics. The pin profile can be controlled by adjusting the current and voltage level. A mathematical model is derived for...

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Bibliographic Details
Published inInternational journal of machine tools & manufacture Vol. 41; no. 15; pp. 2287 - 2296
Main Authors Lim, Young-Mo, Kim, Soo Hyun
Format Journal Article
LanguageEnglish
Published Oxford Elsevier Ltd 01.12.2001
Elsevier
Subjects
Applied sciences
Electric currents
Electric potential
Electrochemical cutting
Etching
Exact sciences and technology
Mathematical models
Mechanical engineering. Machine design
Precision engineering, watch making
Scanning electron microscopy
Experimental result
Voltage current curve
Electrochemical method
Micromachining
Slender body
Microelectromechanical system
Kinetics
Miniaturization
Mathematical model
Modeling
Electrochemical etching
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Summary:This paper deals with a slender micropin, which can be used for micromachining. The shaping mechanism in electrochemical etching is investigated on the basis of electrochemical kinetics. The pin profile can be controlled by adjusting the current and voltage level. A mathematical model is derived for controlling the diameter of the micropin.
Bibliography:ObjectType-Article-2
SourceType-Scholarly Journals-1
ObjectType-Feature-1
content type line 23
ISSN:0890-6955
1879-2170
DOI:10.1016/S0890-6955(00)00129-2