A Vibration Resistant Nanopositioner for Mobile Parallel-Probe Storage Applications

We describe a planar microelectromechanical systems (MEMS)-based x/y nanopositioner designed for parallel-probe storage applications. The nanopositioner is actuated electromagnetically and has x/y motion capabilities of plusmn60 mum. The mechanical components are fabricated from a single-crystal sil...

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Bibliographic Details
Published inJournal of microelectromechanical systems Vol. 16; no. 1; pp. 130 - 139
Main Authors Lantz, M.A., Rothuizen, H.E., Drechsler, U., Haberle, W., Despont, M.
Format Journal Article
LanguageEnglish
Published New York, NY IEEE 01.02.2007
Institute of Electrical and Electronics Engineers
The Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subjects
Actuation
Actuators
atomic force microscopy
Electric shock
Energy consumption
Exact sciences and technology
Finite element methods
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Mathematical analysis
Mechanical instruments, equipment and techniques
microelectromechanical devices
Microelectromechanical systems
Micromechanical devices and systems
motion control
motors
Nanocomposites
Nanomaterials
Nanopositioning
Nanostructure
Physics
Power consumption
Power system modeling
Robustness
Semiconductor device modeling
Silicon
Vibration
Vibrations
Linear systems
Actuators
Energy consumption
Atomic force microscopy
Balancing
Low power
Experimental study
motors
Finite element method
Monocrystals
microelec-tromechanical devices
Vibration control
Modelling
Frequency response
Silicon
Motion control
Microelectromechanical device
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Summary:We describe a planar microelectromechanical systems (MEMS)-based x/y nanopositioner designed for parallel-probe storage applications. The nanopositioner is actuated electromagnetically and has x/y motion capabilities of plusmn60 mum. The mechanical components are fabricated from a single-crystal silicon wafer using a deep-trench-etching process. To render the system robust against vibration, we utilize a mass-balancing concept that makes the system stiff against linear shock, but still compliant for actuation, and therefore results in low power consumption. We present details of the finite-element model used to design the device as well as experimental results for the frequency response, actuation, and vibration-rejection properties of the nanopositioner
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ISSN:1057-7157
1941-0158
DOI:10.1109/JMEMS.2006.886032