On the False-Positive Rate of Statistical Equipment Comparisons Based on the Kruskal-Wallis H Statistic
Using Monte Carlo simulation, we investigate the accuracy of the chi 2 approximation used in statistical equipment comparison based on the Kruskal-Wallis H statistic. We show that this approximation is conservative and gives an incorrect false-positive rate on individual steps as well as on the full...
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Published in | IEEE transactions on semiconductor manufacturing Vol. 20; no. 3; pp. 286 - 292 |
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Main Authors | , |
Format | Journal Article |
Language | English |
Published |
New York, NY
IEEE
01.08.2007
Institute of Electrical and Electronics Engineers The Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
Subjects | |
Online Access | Get full text |
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Summary: | Using Monte Carlo simulation, we investigate the accuracy of the chi 2 approximation used in statistical equipment comparison based on the Kruskal-Wallis H statistic. We show that this approximation is conservative and gives an incorrect false-positive rate on individual steps as well as on the full process flow statistical equipment comparison. Alternative approximations of Wallace are investigated and these are shown to perform significantly better in analysis of datasets typical of semiconductor manufacturing. Wallace approximations also improve the ranking of signals. |
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Bibliography: | ObjectType-Article-2 SourceType-Scholarly Journals-1 ObjectType-Feature-1 content type line 23 |
ISSN: | 0894-6507 1558-2345 |
DOI: | 10.1109/TSM.2007.901398 |