Development of Electrostatic Microactuators: 5-Year Progress in Modeling, Design, and Applications

The implementation of electrostatic microactuators is one of the most popular technical solutions in the field of micropositioning due to their versatility and variety of possible operation modes and methods. Nevertheless, such uncertainty in existing possibilities creates the problem of choosing su...

Full description

Saved in:
Bibliographic Details
Published inMicromachines (Basel) Vol. 13; no. 8; p. 1256
Main Authors Morkvenaite-Vilkonciene, Inga, Bucinskas, Vytautas, Subaciute-Zemaitiene, Jurga, Sutinys, Ernestas, Virzonis, Darius, Dzedzickis, Andrius
Format Journal Article
LanguageEnglish
Published Switzerland MDPI AG 04.08.2022
MDPI
Subjects
Actuators
conducting polymers
Electrodes
electrostatic actuators
Microactuators
micrometric actuators
Micropositioning
Modelling
Nanoparticles
Review
conducting polymers
electrostatic actuators
micrometric actuators
Online AccessGet full text

Cover

More Information
Summary:The implementation of electrostatic microactuators is one of the most popular technical solutions in the field of micropositioning due to their versatility and variety of possible operation modes and methods. Nevertheless, such uncertainty in existing possibilities creates the problem of choosing suitable methods. This paper provides an effort to classify electrostatic actuators and create a system in the variety of existing devices. Here is overviewed and classified a wide spectrum of electrostatic actuators developed in the last 5 years, including modeling of different designs, and their application in various devices. The paper provides examples of possible implementations, conclusions, and an extensive list of references.
Bibliography:ObjectType-Article-1
SourceType-Scholarly Journals-1
ObjectType-Feature-2
ObjectType-Review-3
content type line 23
ISSN:2072-666X
2072-666X
DOI:10.3390/mi13081256