Investigation on the Impact of Excitation Amplitude on AFM-TM Microcantilever Beam System's Dynamic Characteristics and Implementation of an Equivalent Circuit

• Published in: Sensors (Basel, Switzerland) Vol. 24; no. 1; p. 107
• Main Authors: Song, Peijie, Li, Xiaojuan, Cui, Jianjun, Chen, Kai, Chu, Yandong
• Format: Journal Article
• Language: English
• Published: Switzerland MDPI AG 25.12.2023; MDPI
• Subjects: Accuracy; atomic force microscopy; equivalent circuit; Mathematical models; Microelectromechanical systems; Morphology; Multisim; multistability; nonlinear dynamic system; Numerical analysis; Simulation; Simulation methods; multistability; equivalent circuit; atomic force microscopy; nonlinear dynamic system; Multisim
• ISSN: 1424-8220; 1424-8220
• DOI: 10.3390/s24010107

Alterations in the dynamical properties of an atomic force microscope microcantilever beam system in tapping mode can appreciably impact its measurement precision. Understanding the influence mechanism of dynamic parameter changes on the system's motion characteristics is vital to improve the accuracy of the atomic force microscope in tapping mode (AFM-TM). In this study, we categorize the mathematical model of the AFM-TM microcantilever beam system into systems 1 and 2 based on actual working conditions. Then, we analyze the alterations in the dynamic properties of both systems due to external excitation variations using bifurcation diagrams, phase trajectories, Lyapunov indices, and attraction domains. The numerical simulation results show that when the dimensionless external excitation < 0.183, the motion state of system 2 is period 1. When < 0.9, the motion state of system 1 is period 1 motion. Finally, we develop the equivalent circuit model of the AFM-TM microcantilever beam and perform related software simulations, along with practical circuit experiments. Our experimental results indicate that the constructed equivalent circuit can effectively analyze the dynamic characteristics of the AFM-TM microcantilever beam system in the presence of complex external environmental factors. It is observed that the practical circuit simulation attenuates high-frequency signals, resulting in a 31.4% reduction in excitation amplitude compared to numerical simulation results. This provides an essential theoretical foundation for selecting external excitation parameters for AFM-TM cantilever beams and offers a novel method for analyzing the dynamics of micro- and nanomechanical systems, as well as other nonlinear systems.