Taxel-Addressable Matrix of Vertical-Nanowire Piezotronic Transistors for Active and Adaptive Tactile Imaging

• Published in: Science (American Association for the Advancement of Science) Vol. 340; no. 6135; pp. 952 - 957
• Main Authors: Wu, Wenzhuo, Wen, Xiaonan, Wang, Zhong Lin
• Format: Journal Article
• Language: English
• Published: Washington, DC American Association for the Advancement of Science 24.05.2013; The American Association for the Advancement of Science
• Subjects: Arrays; Charge carriers; Devices; Document imaging; Electric current; Electric potential; Electrical engineering; Electrodes; Exact sciences and technology; Fingers; General equipment and techniques; Human; Humans; image analysis; Imaging; Instruments, apparatus, components and techniques common to several branches of physics and astronomy; Mechanical instruments, equipment and techniques; Micromechanical devices and systems; Nanotechnology; Nanowires; Narrative devices; Pattern Recognition, Physiological; Physics; Pressure; robots; Scientific imaging; Semiconductors; Sensors; Sensors (chemical, optical, electrical, movement, gas, etc.); remote sensing; Skin Physiological Phenomena; Topology; Touch; Touch Perception; Transistors; Transistors, Electronic; Transport processes; Voltage; zinc oxide; Zinc oxides; Tactile display; Dimensionality; Adaptive systems; Nanoelectromechanical device; Imagery; Metal-semiconductor contacts; Piezoelectric semiconductors; Integrated circuits; Active system; Stress effects; Zinc oxide; Transport processes; Sensors; Nanowires; Arrays; Transistors; Nanotechnology
• ISSN: 0036-8075; 1095-9203; 1095-9203
• DOI: 10.1126/science.1234855

Designing, fabricating, and integrating arrays of nanodevices into a functional system are the key to transferring nanoscale science into applicable nanotechnology. We report large-array three-dimensional (3D) circuitry integration of piezotronic transistors based on vertical zinc oxide nanowires as an active taxel-addressable pressure/force sensor matrix for tactile imaging. Using the piezoelectric polarization charges created at a metal-semiconductor interface under strain to gate/modulate the transport process of local charge carriers, we designed independently addressable two-terminal transistor arrays, which convert mechanical stimuli applied to the devices into local electronic controlling signals. The device matrix can achieve shape-adaptive high-resolution tactile imaging and self-powered, multidimensional active sensing. The 3D piezotronic transistor array may have applications in human-electronics interfacing, smart skin, and micro-and nanoelectromechanical systems.