Advanced In Situ TEM Microchip with Excellent Temperature Uniformity and High Spatial Resolution

• Published in: Sensors (Basel, Switzerland) Vol. 23; no. 9; p. 4470
• Main Authors: Zhang, Xuelin, Zhou, Yufan, Chen, Ying, Li, Ming, Yu, Haitao, Li, Xinxin
• Format: Journal Article
• Language: English
• Published: Switzerland MDPI AG 04.05.2023; MDPI
• Subjects: Accuracy; Chemical reactions; Design; Experiments; gas cell; Gases; Heat; in situ TEM; Integrated circuits; MEMS; microchip; Nanoparticles; Researchers; Scientists; Semiconductor chips; Semiconductors; Silicon nitride; Temperature; temperature uniformity; Wire; temperature uniformity; MEMS; microchip; gas cell; in situ TEM

Transmission electron microscopy (TEM) is a highly effective method for scientific research, providing comprehensive analysis and characterization. However, traditional TEM is limited to observing static material structures at room temperature within a high-vacuum environment. To address this limita...