Femtosecond Laser Processing by Using Patterned Vector Optical Fields

We present and demonstrate an approach for femtosecond laser processing by using patterned vector optical fields (PVOFs) composed of multiple individual vector optical fields. The PVOFs can be flexibly engineered due to the diversity of individual vector optical fields in spatial arrangement and dis...

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Bibliographic Details
Published inScientific reports Vol. 3; no. 1; p. 2281
Main Authors Lou, Kai, Qian, Sheng-Xia, Ren, Zhi-Cheng, Tu, Chenghou, Li, Yongnan, Wang, Hui-Tian
Format Journal Article
LanguageEnglish
Published London Nature Publishing Group UK 25.07.2013
Nature Publishing Group
Subjects
639/624/1111/1113
639/624/400/385
639/766/25
639/766/930/1032
Crystals
Humanities and Social Sciences
multidisciplinary
Polarization
Polymerization
Science
Silicon
Spatial distribution
Synthetic products
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Summary:We present and demonstrate an approach for femtosecond laser processing by using patterned vector optical fields (PVOFs) composed of multiple individual vector optical fields. The PVOFs can be flexibly engineered due to the diversity of individual vector optical fields in spatial arrangement and distribution of states of polarization and it is easily created with the aid of a spatial light modulator. The focused PVOFs will certainly result in various interference patterns, which are then used to fabricate multi-microholes with various patterns on silicon. The present approach can be expanded to fabricate three-dimensional microstructures based on two-photon polymerization.
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ISSN:2045-2322
2045-2322
DOI:10.1038/srep02281