Influence of material parameters on acoustic wave propagation modes in ZnO/Si bi-layered structures

• Published in: IEEE transactions on ultrasonics, ferroelectrics, and frequency control Vol. 52; no. 12; pp. 2361 - 2369
• Main Authors: Hui-dong Gao, Shu-yi Zhang, Xue Qi, Wasa, K., Hao-dong Wu
• Format: Journal Article
• Language: English
• Published: New York, NY IEEE 01.12.2005; Institute of Electrical and Electronics Engineers; The Institute of Electrical and Electronics Engineers, Inc. (IEEE)
• Subjects: Acoustic coupling; Acoustic materials; Acoustic propagation; Acoustic waves; Acoustics; Acoustics - instrumentation; Computer Simulation; Computer-Aided Design; Coupling coefficients; Dispersion; Dispersions; Equipment Design; Equipment Failure Analysis; Exact sciences and technology; Frequency; Fundamental areas of phenomenology (including applications); General equipment and techniques; Instruments, apparatus, components and techniques common to several branches of physics and astronomy; Materials Testing; Micromechanical devices; Models, Chemical; Physics; Piezoelectric films; Radiation Dosage; Radiometry - methods; Silicon; Silicon - chemistry; Silicon - radiation effects; Silicon substrates; Substrates; Transducers; Transistors; Ultrasonics, quantum acoustics, and physical effects of sound; Ultrasonography - instrumentation; Ultrasonography - methods; Wave propagation; Zinc oxide; Zinc Oxide - chemistry; Zinc Oxide - radiation effects; Mode coupling; Acoustic wave; Dispersion relation; Acoustic coupling; Experimental study; Electromechanical coupling; Wavelength; Thin film; Wave dispersion; Wave coupling; Acoustic parameter; Coupled modes; Transfer matrix method; Properties of materials; Zinc oxide; Propagation mode
• ISSN: 0885-3010; 1525-8955
• DOI: 10.1109/TUFFC.2005.1563280

The influences of material properties on acoustic wave propagation modes in ZnO/Si bi-layered structures are studied. The transfer matrix method is used to calculate dispersion relations, wave field distributions, and electromechanical coupling coefficients of acoustic wave propagation modes in ZnO/Si bi-layered systems, in which the thickness of the substrate is of the same order of magnitude as the wavelength of the propagating wave modes. The influences of the thin film parameters on the acoustic wave propagation modes and their electromechanical coupling coefficients of the wave modes also are obtained. In addition, some experimental results for characterizing the wave propagation modes and their frequencies have also been obtained, which agree well with the theoretical predictions.