Tipping solutions: emerging 3D nano-fabrication/ -imaging technologies

The evolution of optical microscopy from an imaging technique into a tool for materials modification and fabrication is now being repeated with other characterization techniques, including scanning electron microscopy (SEM), focused ion beam (FIB) milling/imaging, and atomic force microscopy (AFM)....

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Published inNanophotonics (Berlin, Germany) Vol. 6; no. 5; pp. 923 - 941
Main Authors Seniutinas, Gediminas, Balčytis, Armandas, Reklaitis, Ignas, Chen, Feng, Davis, Jeffrey, David, Christian, Juodkazis, Saulius
Format Journal Article
LanguageEnglish
Published Berlin De Gruyter 01.09.2017
Walter de Gruyter GmbH
Subjects
3D fabrication
81.07.-b
Atomic force microscopy
Devices
Fluidics
Imaging
Ion beams
nanofabrication
nanophotonics
nanoscale
Nanostructure
Nanotechnology
Optical microscopy
Photonics
Scanning electron microscopy
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Summary:The evolution of optical microscopy from an imaging technique into a tool for materials modification and fabrication is now being repeated with other characterization techniques, including scanning electron microscopy (SEM), focused ion beam (FIB) milling/imaging, and atomic force microscopy (AFM). Fabrication and imaging of materials undergoing a three-dimensional (3D) nano-structuring within a 1−100 nm resolution window is required for future manufacturing of devices. This level of precision is critically in enabling the cross-over between different device platforms (e.g. from electronics to micro-/nano-fluidics and/or photonics) within future devices that will be interfacing with biological and molecular systems in a 3D fashion. Prospective trends in electron, ion, and nano-tip based fabrication techniques are presented.
ISSN:2192-8614
2192-8606
2192-8614
DOI:10.1515/nanoph-2017-0008