Design, fabrication, and testing of a bistable electromagnetically actuated microvalve

• Published in: Journal of microelectromechanical systems Vol. 9; no. 2; pp. 181 - 189
• Main Authors: Capanu, M., Boyd, J.G., Hesketh, P.J.
• Format: Journal Article
• Language: English
• Published: New York, NY IEEE 01.06.2000; Institute of Electrical and Electronics Engineers; The Institute of Electrical and Electronics Engineers, Inc. (IEEE)
• Subjects: Beams; Beams (structural); Damping; Design engineering; Elasticity; Exact sciences and technology; Fabrication; Ferrous alloys; Flow control; Flow rate; Foils (structural shapes); Instruments, apparatus, components and techniques common to several branches of physics and astronomy; Intermetallic compounds; Iron alloys; Magnetoelasticity; Mechanical instruments, equipment and techniques; Metal foil; Micromechanical devices and systems; Microvalves; Nickel alloys; Nickel base alloys; Photolithography; Physics; Pressure control; Process design; Silicon; Testing; Valves; Valves (mechanical); Water flow; Coils; Energy consumption; Precision engineering; Elasticity; Control synthesis; Magnetic force; Reservoir; Valves; Water flow; Manufacturing processes; Squeeze film; Flow control; Electrodeposition; Vibration control; Silicon; Photolithography; Testing; Energy flow; Electromagnetism; Balancing; System design; Bistable; Experimental study; Time response; Beam(mechanics); Bistability; Vibration damping; Response time; Miniaturization; Orifice flow

A bistable electromagnetically actuated microvalve was designed, processed, and tested. The valve was designed to control a water flow of 0.05-0.5 /spl mu/s from a reservoir at a pressure of 1-2000 Pa. The two valve components were fabricated in silicon, the upper piece comprises an electroplated go...